Development of micropin fabrication process using tool based micromachining

Rahman, M.; Kumar, A. Senthil; Lim, H. S.; Asad, A.B.M.A.

doi:10.1007/s00170-004-2270-9

Cited by 47 publications

(23 citation statements)

References 8 publications

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“…They are usually accomplished by two basic groups of micromachining processes: mask based and tool based (mechanical micromachining). The mask based technology has the limitations of fabricating 3D structures [1,2] and mechanical micro engineering is an easy and cheap way to fabricate microstructures [3]. For this mechanical micromachining, the fabrication of hard molds has typically been done by grinding with micro diamond wheels [4,5].…”

Section: Introductionmentioning

confidence: 99%

Design and development of PCD micro straight edge end mills for micro/nano machining of hard and brittle materials

et al. 2010

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One of the biggest challenges for mechanical micro/nano milling is the design and fabrication of high precision and high efficiency micro milling tools. Commercially available micro milling tools are either too expensive (around several hundred US dollars) or simply made from downsizing of macro milling tools, which is sometimes not appropriate for the specific micro/nano milling requirements. So the design and fabrication of custom micro milling tools are necessary. In this paper, a micro straight edge endmill (SEE) is designed. Static and dynamic FEM analyses have been done for the SEEs with different rake angles trying to identify their stiffness and natural frequencies. By wire electrical discharge machining (WEDM), the SEEs made of polycrystalline diamond (PCD) with three different rake angles have been fabricated. The evaluation milling on tungsten carbide (WC) and silicon wafer have processed on a nano milling center. Experimental results show the SEEs have a good ability to simultaneously micro/nano milling of both the side and bottom surfaces with submicron surface roughness, and the SEE has high accuracy for large aspect ratio thin wall machining. The milling experiments on silicon wafer have successfully demonstrated that ductile mode machining was achieved and the coolant played an important role in silicon wafer milling.

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Section: Introductionmentioning

confidence: 99%

Design and development of PCD micro straight edge end mills for micro/nano machining of hard and brittle materials

et al. 2010

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“…Mechanical micro engineering is an easy and cheap way to fabricate microstructures (Rahman 2006). For this mechanical micromachining, the fabrication of hard moulds has typically been done by grinding with micro diamond wheels (Rahman 2007, Schaller 1999.…”

Section: Introductionmentioning

confidence: 99%

Development of a computer assistant programming system for micro/nano milling tool fabrication by multi-axis wire EDM

Cheng¹,

Wang²,

Kobayashi³

et al. 2009

International Journal of Computer Integrated Manufacturing

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Micro/nano milling tools are usually made of ultra hard materials. Wire EDM (electrical discharge machining) may be the best choice to fabricate these tools conveniently and efficiently. For micro/nano milling tools with complicated three-dimensional (3D) geometries, manually programming method is not applicable. The CAM (computer-aided manufacturing) systems existing in the market don't take the special WEDM (Wire EDM) processes for micro/nano milling tools into consideration. In order to generate the NC programs automatically for the multi-axis WEDM machine to fabricate micro/nano milling tools, a computer assistant system, also called the CAM system, is developed in this paper. The CAM system takes the special WEDM processes into consideration for the fabrication of micro/nano milling tools. First, based on the interfaces and the databases of the CAM system, geometries of micro/nano milling tools, machining conditions for different portions of the tools, WEDM machine tool specifications and controller properties are defined. Second, the manually input tool geometries are verified and WL (wire location) data are generated and verified. Third, simultaneously maximum six-axis CNC programs are generated automatically for the specific micro/nano milling tool. Key techniques for the development of the CAM system are introduced in the paper and micro/nano milling tool fabrication experiment done in this paper shows the efficiency and accuracy of the CNC program generated by the developed CAM system.

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“…One of the most popular micron/ nanometer level machining applications is to create molds for super precision micro glass products made of very hard materials, which are usually accomplished by two basic groups of micromachining process: mask-based and toolbased (mechanical micromachining). The mask-based technology has the limitations of fabricating 3D structures [1,2] and mechanical micro engineering is an easy and cheap way to fabricate microstructures [3]. For this mechanical micromachining, the fabrication of hard molds has typically been done by grinding with micro diamond wheels [4,5].…”

Section: Introductionmentioning

confidence: 99%

Tool fabrication system for micro/nano milling—function analysis and design of a six-axis Wire EDM machine

Cheng

Wang

Kobayashi

et al. 2009

Int J Adv Manuf Technol

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The dies or molds used for the fabrication of micro products usually are made of ultra-hard materials such as tungsten carbide or silicon carbide and have sophisticated three-dimensional geometries. Such kind of dies or molds can only be fabricated by milling operations instead of grinding processes with ultra-hard milling tools made of PCD or CBN. Electrical discharge machining (EDM) is a good choice for the fabrication of such ultrahard tools. In this paper, a function analysis and design of a six-axis Wire EDM (WEDM) machine is introduced. Based on the typical micro/nano cutting tool geometry features, a mathematical model between the cutting tool and the electrode wire is built. Then, the mathematical model is analyzed and it turns out that six axes are needed for cutting such complicated tool geometries. According to the WEDM features, first the axes are allocated to the workpiece side and the electrode wire side. The workpiece is assigned three linear motions and one rotary motion around its center line and the wire has two rotary motions. Second, the axis sequences are defined. At last, the best concept of the mechanical structure for the six-axis WEDM machine is selected.

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Development of micropin fabrication process using tool based micromachining

Cited by 47 publications

References 8 publications

Design and development of PCD micro straight edge end mills for micro/nano machining of hard and brittle materials

Design and development of PCD micro straight edge end mills for micro/nano machining of hard and brittle materials

Development of a computer assistant programming system for micro/nano milling tool fabrication by multi-axis wire EDM

Tool fabrication system for micro/nano milling—function analysis and design of a six-axis Wire EDM machine

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