2003
DOI: 10.1016/s0263-2241(02)00058-1
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Development of miniaturized semiconductor flow sensors

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Cited by 67 publications
(41 citation statements)
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References 12 publications
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“…To overcome the saturation, the heating power at higher flow velocity must be increased. This operating mode can be achieved by electronically controlling the heater voltage and thus the heating power in order to keep the temperature difference between the sensor and the fluid at a constant level (CTconstant temperature mode of the calorimetric flow sensor) (Kohl et al, 2003). The mean sensor temperature can be obtained from the voltage U 3 (Eq.…”
Section: Calorimetric Approachmentioning
confidence: 99%
See 1 more Smart Citation
“…To overcome the saturation, the heating power at higher flow velocity must be increased. This operating mode can be achieved by electronically controlling the heater voltage and thus the heating power in order to keep the temperature difference between the sensor and the fluid at a constant level (CTconstant temperature mode of the calorimetric flow sensor) (Kohl et al, 2003). The mean sensor temperature can be obtained from the voltage U 3 (Eq.…”
Section: Calorimetric Approachmentioning
confidence: 99%
“…This method needs one resistor which acts as heater and transducer at the same time, and, in some cases, a second resistor as sensor for the ambient temperature. This technology is known to be very sensitive regarding the flow velocity (Kohl et al, 2003). However, several drawbacks are the fragile design and the relatively expensive technology.…”
Section: Introductionmentioning
confidence: 99%
“…Bei kalorimetrischen Strömungssensoren (KSS) hingegen findet eine räumliche Trennung zwischen Aktuator und Sensor statt. Im einfachsten Fall bestehen sie aus einem Heizer und zwei benachbarten Temperatursensoren, von denen jeweils einer stromaufwärts und ein anderer stromabwärts angeordnet ist, wodurch neben der Geschwindigkeit auch die Strömungsrichtung detektiert werden kann [10].…”
Section: Allgemeinesunclassified
“…Abbildung 2 zeigt eine Mikroskopaufnahme des elementarsten KSS Layouts, bei dem um einen ohmschen Heizer (H) aus Chrom zwei Thermistoren (MT 1 und MT 2 ) aus aGe symmetrisch angeordnet sind [10]. Im Sensorbetrieb ist das Bauelement in einem Strömungskanal laut Abb.…”
Section: Klassisches Layoutunclassified
“…Although there is no established method for the response time measurements due to the difficulties of realizing generated defined fluidic steps [3], there are reports about measuring the response time. Some of these reports are: Sosna et al [3], Ashauer et al [5], Kohl et al [6] and de Bree et al [7]. In the first one, Sosna et al investigate an electrical measurement of thermal response time and present a model for that measurement.…”
Section: Open Accessmentioning
confidence: 99%