Development of Moving Mirror Assembly in the Spectroscopic Sensor for Remote Gas Monitoring

Bae, Hae-Young; Jang, Hankee; Park, Do-Hyun; Kim, Ho-Sang

doi:10.7736/jkspe.021.025

Cited by 4 publications

(4 citation statements)

References 13 publications

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“…In addition, its size should be limited so that the incident light cannot exceed the outer circumference of the reflecting mirror, as shown in Table 1. 17,18…”

Section: Fast Steering Mirror For Portable Spectroscopic Sensorsmentioning

confidence: 99%

“…It is kinematically driven by three piezoelectric actuators 30 and is driven by low voltage amplifier to compensate the tilting error. The linear moving module is actuated by voice coil motor with spiral type spring and moves back and forth along the sinusoidal trajectory with amplitude of 2.5 mm by position-controlled loop 18 The tilting error from the linear moving module is measured through the PSDM sensor, and the control inputs, Tilt X and Tilt Y for compensation, are calculated by controller (DeltaTau UMAC). A proportional-integral feedback control algorithm with feedforward input was implemented to compensate the tilt error while suppressing the inherent hysteresis effect of the piezoelectric actuator of fast steering mirror.…”

Section: Feedback Control Test Of Fast Steering Mirrormentioning

confidence: 99%

“…In addition, its size should be limited so that the incident light cannot exceed the outer circumference of the reflecting mirror, as shown in Table 1. 17,18 Figure 2 is an exploded view of the fast steering mirror that is proposed in this research to be miniaturized in consideration of the mobility of the spectroscopic interferometer. It is composed of a mirror, mirror adapter, flexure hinges, and piezoelectric actuators.…”

Section: Fast Steering Mirror For Portable Spectroscopic Sensorsmentioning

confidence: 99%

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Development of piezoelectric fast steering mirror with tilt error compensation for portable spectroscopic sensor

Kim

Lee

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part B:

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Fast steering mirror, a key component that can compensate for the distortion of the optical axis, plays an essential role in portable spectroscopic sensors. Because the performance of the fast steering mirror has a great influence on the accuracy of the interferometer in the spectroscopic sensor, it is important to verify whether it can satisfy the design requirements by evaluating the performance. In this study, a piezoelectric fast steering mirror with high-resolution and high-speed tilting capability for a portable spectroscopic sensor was fabricated and tested. Design requirements such as steering angle, resolution, and frequency range were set for portable spectroscopic sensors and elastic guide structures actuated by piezoelectric actuators were proposed. Before fabrication, the performances of the proposed fast steering mirror were examined by the finite element method. To verify the proposed fast steering mirror, a prototype was manufactured with a size of 24.5 mm × 24.5 mm × 37.4, including a mirror with a diameter of 20 mm and thickness of 3 mm. This prototype can provide the sufficient convenience for mounting on a spectroscopic sensor for gas monitoring at a distance. Its performance was tested, confirming a steering range of 0.56°, resolution of 1.27 µrad seconds and natural frequency of 282 Hz. In addition, through a performance evaluation test using a visible light laser on an optical test bed, the ability to compensate the tilt error within a few seconds was confirmed for its applicability to actual spectroscopic interferometer products in the future.

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“…In addition, its size should be limited so that the incident light cannot exceed the outer circumference of the reflecting mirror, as shown in Table 1. 17,18…”

Section: Fast Steering Mirror For Portable Spectroscopic Sensorsmentioning

confidence: 99%

Section: Feedback Control Test Of Fast Steering Mirrormentioning

confidence: 99%

Section: Fast Steering Mirror For Portable Spectroscopic Sensorsmentioning

confidence: 99%

See 1 more Smart Citation

Development of piezoelectric fast steering mirror with tilt error compensation for portable spectroscopic sensor

Kim

Lee

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part B:

Self Cite

View full text Add to dashboard Cite

show abstract

“…Therefore, by introducing a fast steering mirror that can compensate for the distortion of the optical axis at high speed, it is possible to prevent the performance degradation of the interferometer unit and secure the ease of alignment in the actual spectral sensor product. Also, fast steering mirror with tilting error compensation capability should be made as small as possible so that the user can handle the portable spectroscopic sensor easily (2).…”

Section: Introductionmentioning

confidence: 99%

Development of ultra-small fast steering mirror for spectroscopic sensor with high speed and excellent disturbance rejection characteristics

Lee¹,

Chang²,

Lee³

et al. 2022

Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022)

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Design optimization of a flexure spring used in small-sized ultra-precise optical instrument

Kim,

Lee,

Kim

2023

Heliyon

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Development of Moving Mirror Assembly in the Spectroscopic Sensor for Remote Gas Monitoring

Cited by 4 publications

References 13 publications

Development of piezoelectric fast steering mirror with tilt error compensation for portable spectroscopic sensor

Development of piezoelectric fast steering mirror with tilt error compensation for portable spectroscopic sensor

Development of ultra-small fast steering mirror for spectroscopic sensor with high speed and excellent disturbance rejection characteristics

Design optimization of a flexure spring used in small-sized ultra-precise optical instrument

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