New self-luminous displays such as organic light-emitting diode and micro light-emitting diode devices are attracting increasing attention. Moreover, many researchers are working to improve the light extraction efficiency of these devices to increase the display brightness. Proposed light extraction methods include refractive index control layers, controlled surface texture structures, and light-diffusion layers. Of these, our focus was on the light-diffusion layer, which requires suitable light diffusion, high transparency, high light resistance, and patternability for forming wiring connection areas. In this paper, we introduce novel photosensitive siloxane coatings using positive-tone photosensitive siloxane and a lightdiffusion filler (TiO2 or ZrO 2). These coatings control the haze value in the range of 5% to 72% in the form of a thin film (1 µm). In addition, the films have a high transparency, good light resistance, and appropriate patternability. Therefore, these photosensitive siloxane coatings with light-diffusion properties are suitable for new self-luminous displays.