Development of novel piezoelectric materials for Si-based MEMS application

Funakubo, H.; Yasui, Shintaro; Yazawa, Kazuhiko; Nagata, Junichi; Oikawa, Takahiro; Morioka, Hiroshi; Yamada, Takasi

doi:10.7567/ssdm.2012.i-3-1

Extended Abstracts of the 2012 International Conference on Solid State Devices and Materials 2012

DOI: 10.7567/ssdm.2012.i-3-1

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Development of novel piezoelectric materials for Si-based MEMS application

H. Funakubo¹,

Shintaro Yasui²,

Kazuhiko Yazawa³

et al.

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Development of novel piezoelectric materials for Si-based MEMS application

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