“…Numerous studies have addressed the preparation of individual components of thin-film SSLIBs by ALD, such as cathodes [ 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ], anodes [ 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 ] and solid-state electrolytes [ 50 , 51 , 52 , 53 ]. Using several precursors in the ALD chamber allows the fabrication of all the SSLIB components using ALD equipment [ 12 ].…”