Development of Secondary Ion Optical System to Achieve Three-Dimensional Shave-off SIMS

Abstract

Secondary ion mass spectrometry (SIMS) has some disadvantages including degradation in depth resolution depending on the depth which are difficult to resolve. To address these disadvantages, we have previously developed shave-off SIMS and achieved two-dimensional mapping. In this study, we designed the appropriate secondary ion optical system by simulation to achieve three-dimensional shave-off SIMS. We developed new optical parts and evaluated the abilities of the designed secondary ion optical system. We acquired the following abilities of the secondary ion optical system: magnification ratio 1.6 × 10 2 , Z-axial resolution 0.70 m, and transmission > 0.1%.

Simulation of Secondary Ion Position on the Detector for Three-dimensional Shave-off Method

“…Through the previous studies, the introduced magnification lens system had verified that the secondary ions were enlarged only in the depth direction (Z axis) and converged on the Mattuach-Herzog type mass analyzer in the SIMS [6]. As the simulation results, the secondary ions sputtered from a micrometer-sized sample were magnified to a millimeter size at the detector and had 1.4 μm of the Z-axial resolution [7].…”

“…The design and setting of the 3D shave-off SIMS system in the SIMION program are shown in Figure 4. The workbench of the 3D shave-off SIMS system was described in more detail on previous studies [6,7].…”