Development of Simple-Structure Magnetic Membrane Actuator for Synthetic Jet Application

Abstract

In this work, a magnetic membrane actuator that involves simple fabrication process and low cost is developed based on electroplating technique, and its dynamic performance is examined. The magnetic actuator consists of an element of soft ferromagnetic material embedded in PDMS circular membrane. It is driven by attracting the soft ferromagnetic element using external magnet that is attached on a shaft of electrical motor. When the shaft is rotated, the magnet will move back and forth towards the membrane. In this study, the nickel element as a soft ferromagnetic material is designed as a simple circular disk with four straight arms, and it is fabricated into three different thicknesses, i.e. 49±3, 70±7 and 100±6 μm, while PDMS thickness is fixed at 280±33 µm. The dynamic performances of 2-cm membrane actuators are examined using a capacitive sensor in the actuating frequency range of 40-240 Hz. The experimental results show that there are two motion patterns, i.e. small and strong oscillations, where the transition frequency is approximately at 100 Hz. In addition, with the increment of nickel element’s thickness, gain and peak frequency, where gain peaks occur, increase while peak-to-peak amplitude decreases.

Design, Fabrication and Evaluation of a Novel Electro Thermal Micro-Gripper for Handling of Head Gimbal Assembly

“…An electroplating process on a stainless substrate is a key fabrication technique employed to construct the gripper's mechanism due to its ease of employment and low cost [11][12]. A schematic of micro fabrication is shown in Figs.…”

Multi-state, three-way, normally open mini valve based on 3D printed flexible magnets using origami-inspired magnetization

“…Using flexible magnets, compared with bulk permanent magnets, it is achievable to manufacture complicated shapes at a relatively lower cost and with fewer manufacturing stages [33]. In addition, flexible magnets effectively solve the problem of flexibility loss caused by a mechanical attachment of a bulk magnet onto a polymer membrane [34,35]. A UV curing 3D-printed technology is utilized to manufacture valve components, including flexible magnets and valve shells, presenting fewer fabrication steps and lower costs than the state-of-the-art research works on MEMS fluidic valves.…”