Development of Slow Start Safety Cylinder Valve to Inhibit Adiabatic Compression for Oxidized Gases

Abstract

Slow Start Safety Cylinder Valve (S3V) has been developed to inhibit adiabatic compression. S3 V can control to increase the pressure slower than conventional pneumatic valve (PV) during the secondary pressure goes up, so that it can inhibit adiabatic compression and decomposition of oxidized gases. We have confirmed that S3 V achieved lower temperature than PV by adiabatic compression theoretically and experimentally. Therefore, S3V is convenient to secure from accidents for oxidized gases in semiconductorfabs.