Development of soft X-ray microscopy System using X-ray laser in JAERI Kansai

Kishimoto, Maki; Tanaka, Momoko; Tai, RZ; Sukegawa, Kouta; Kado, M.; Hasegawa, Noboru; Tang, Huajing; Kawachi, Tetsuya; Lü, Ping; Nagashima, Keisuke; Daido, H.; Kato, Yoshiaki; Nagai, Kazutoshi; Takenaka, Hisataka

doi:10.1051/jp4:200300048

Cited by 16 publications

(11 citation statements)

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“…Better spatial resolution equal to 75 nm was reported utilizing an SXR laser at k = 4.48 nm, pumped by a large fusion class NOVA laser [2]. Recently different approaches have emerged due to the development of smaller scale short-wavelength sources such as HHG [3], EUV lasers [4] and incoherent laser plasma-based sources [5] that have been successfully used for sub-micrometer resolution imaging. Using radiation from a table-top capillary discharge EUV laser images were obtained with a spatial resolution of 120-150 nm [6].…”

Section: Introductionmentioning

confidence: 99%

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

et al. 2013

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We report on a compact, desktop size, laboratory type microscopy setup, based on a short wavelength gas puff target soft X-ray source, which emits incoherent radiation in ''water-window'' spectral range. The microscope employs a Wolter type I reflective objective and allows capturing magnified images of objects with *1-lm spatial resolution and exposure time as low as 5 s. A detailed characterization and optimization of both the source and the microscope setups are presented and discussed.

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Section: Introductionmentioning

confidence: 99%

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

et al. 2013

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“…Better spa− tial resolution equal to 75 nm was reported utilizing a SXR laser at l = 4.48 nm, pumped by a large fusion−class NOVA laser [3]. Recently, different approaches have emerged due to the development of smaller−scale short wavelength so− urces such as high order harmonic generation (HHG) [4], EUV lasers [5] and incoherent laser−plasma sources [6] that have been successfully used for sub−micrometer resolution imaging. Using radiation from a table−top capillary dischar− ge EUV laser images were obtained with a spatial resolu− tion of 120-150 nm [7], later improved to~50 nm [8,9].…”

Section: Previous Workmentioning

confidence: 99%

Recent advancements in the “water-window” microscopy with laser-plasma SXR source based on a double stream gas-puff target

Wachulak

2016

Opto-Electronics Review

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“…Better spatial resolution equal to 75 nm was reported utilizing a SXR laser at l = 4.48 nm, pumped by the large fusion−class NOVA laser [21]. Recently, differ− ent approaches have emerged due to the development of smaller−scale short−wavelength sources such as HHG [22], EUV lasers [23] and incoherent laser−plasma based sources [24] that have been successfully used for sub−micrometer resolution imaging. Using radiation from table top capillary EUV laser images were obtained with a spatial resolution of 120-150 nm [25].…”

Section: Introductionmentioning

confidence: 99%

Aspects of nanometer scale imaging with extreme ultraviolet (EUV) laboratory sources

Wachulak

Marconi

Isoyan

et al. 2012

Opto-Electronics Review

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Imaging systems with nanometer resolution are instrumental to the development of the fast evolving field of nanoscience and nanotechnology. Decreasing the wavelength of illumination is a direct way to improve the spatial resolution in photon-based imaging systems and motivated a strong interest in short wavelength imaging techniques in the extreme ultraviolet (EUV) region. In this review paper, various EUV imaging techniques, such as 2D and 3D holography, EUV microscopy using Fresnel zone plates, EUV reconstruction of computer generated hologram (CGH) and generalized Talbot self-imaging will be presented utilizing both coherent and incoherent compact laboratory EUV sources. Some of the results lead to the imaging with spatial resolution reaching 50 nm in a very short exposure time. These techniques can be used in a variety of applications from actinic mask inspection in the EUV lithography, biological imaging to mask-less lithographic processes in nanofabrication.

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Development of soft X-ray microscopy System using X-ray laser in JAERI Kansai

Cited by 16 publications

References 0 publications

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

Recent advancements in the “water-window” microscopy with laser-plasma SXR source based on a double stream gas-puff target

Aspects of nanometer scale imaging with extreme ultraviolet (EUV) laboratory sources

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