Development of Ultra-Low-Noise TES Bolometer Arrays

Suzuki, Toyoaki; Khosropanah, P.; Ridder, M.; Hijmering, R. A.; Gao, J. R.; Akamatsu, Hiroki; Gottardi, L.; Kuur, J. van der; Jackson, B. D.

doi:10.1007/s10909-015-1401-z

Cited by 31 publications

(30 citation statements)

References 11 publications

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“…Furthermore, we introduced a Helmholtz coil to investigate TESs response as a function of the applied magnetic field. With a similar setup, we have demonstrated an ultra-low NEP (Noise equivalent power) bolometer for the first time (N EP dark ∼ 1 × 10 −19 W/ √ Hz: Suzuki et al 2016 15 ). For the performance evaluation of TESs calorimerter, stable bath temperature is of importance.…”

Section: Methodsmentioning

confidence: 92%

Development of frequency domain multiplexing for the X-ray Integral Field unit (X-IFU) on the Athena

et al. 2016

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We are developing the frequency domain multiplexing (FDM) read-out of transition-edge sensor (TES) microcalorimeters for the X-ray Integral Field Unit (X-IFU) instrument on board of the future European X-Ray observatory Athena. The X-IFU instrument consists of an array of ∼3840 TESs with a high quantum efficiency (>90 %) and spectral resolution ∆E=2.5 eV @ 7 keV (E/∆E ∼2800). FDM is currently the baseline readout system for the X-IFU instrument. Using high quality factor LC filters and room temperature electronics developed at SRON and low-noise two stage SQUID amplifiers provided by VTT, we have recently demonstrated good performance with the FDM readout of Mo/Au TES calorimeters with Au/Bi absorbers. An integrated noise equivalent power resolution of about 2.0 eV at 1.7 MHz has been demonstrated with a pixel from a new TES array from NASA/Goddard (GSFC-A2). We have achieved X-ray energy resolutions ∼2.5 eV at AC bias frequency at 1.7 MHz in the single pixel read-out. We have also demonstrated for the first time an X-ray energy resolution around 3.0 eV in a 6 pixel FDM read-out with TES array (GSFC-A1). In this paper we report on the single pixel performance of these microcalorimeters under MHz AC bias, and further results of the performance of these pixels under FDM.

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Section: Methodsmentioning

confidence: 92%

Development of frequency domain multiplexing for the X-ray Integral Field unit (X-IFU) on the Athena

et al. 2016

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“…Previously we reported electrical NEPs as low as 1.1×10 -19 W/√Hz for the TES-C and 1.5×10 -19 W/√Hz For the TES-B devices [3]. The difference between the measured NEPs could be explained by difference in the length of their legs and it was clear that the larger SiN island does not increase the noise.…”

Section: Introductionmentioning

confidence: 82%

“…However for TES-A devices the measured NEPs were about 5-6×10 -19 W/√Hz. The observed excess noise is either intrinsic to the device (for example caused by the internal thermal fluctuation noise between the absorber and the TES) or the photon noise due to the stray light, which could only be seen by the devices with absorbers [3]. Since the absorber is very thin and most likely well thermalized with the island, the latter was identified as the source of the extra noise.…”

Section: Introductionmentioning

confidence: 99%

Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

et al. 2016

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SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 µm) and thin (0.25 µm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840×840 µm 2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1×10 -19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2×10 -19 W/√Hz. All bolometers are 50×50 µm 2 and made of Ti/Au (16/65 nm) bilayer on a 0.25 µm thick suspended SiN island. The absorbers are 200×200 µm 2 and made of 8 nm thick tantalum (Ta). The large SiN islands are 220×280 µm 2 and the small ones 70×70 µm 2 . The SiN legs are about 0.5 µm wide and 350 µm long for large devices and 460 µm for small ones.Fabrication of TES bolometers includes 14 lithography steps and finishes with a deep reactive-ion etching (DRIE) process that is explained in detail by Ridder et al [2]. *P.Khosropanah@sron.nl; phone +31 88777 5678; fax +31 88777 5601; sron.nl Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII, edited by Wayne S. Holland, Jonas Zmuidzinas, Proc. of SPIE Vol. 9914, 99140B

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“…The Very Long Wavelength Grating module is shown in the right panel of Figure 11 as an example of the GM design. SAFARI employs the latest generation of ultrasensitive TES to detect the incoming photons Audley et al, 2016;Suzuki et al, 2016;Goldie et al, 2012;Beyer et al, 2012). TES bolometers fabricated at SRON have already demonstrated the required NEP , as well as the required optical efficiency (Audley et al, 2016).…”

Section: The Safari Detector Grating Modulesmentioning

confidence: 99%

SPICA—A Large Cryogenic Infrared Space Telescope: Unveiling the Obscured Universe

Roelfsema

Shibai

Armus

et al. 2018

Publ. Astron. Soc. Aust.

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104

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Measurements in the infrared wavelength domain allow us to assess directly the physical state and energy balance of cool matter in space, thus enabling the detailed study of the various processes that govern the formation and early evolution of stars and planetary systems in the Milky Way and of galaxies over cosmic time. Previous infrared missions, from IRAS to Herschel, have revealed a great deal about the obscured Universe, but sensitivity has been limited because up to now it has not been possible to fly a telescope that is both large and cold. Such a facility is essential to address key astrophysical questions, especially concerning galaxy evolution and the development of planetary systems.SPICA is a mission concept aimed at taking the next step in mid-and far-infrared observational capability by combining a large and cold telescope with instruments employing state-of-the-art ultrasensitive detectors. The mission concept foresees a 2.5-meter diameter telescope cooled to below 8 K. Rather than using liquid cryogen, a combination of passive cooling and mechanical coolers will be used to cool both the telescope and the instruments. With cooling not dependent on a limited cryogen supply, the mission lifetime can extend significantly beyond the required three years. The combination of low telescope background and instruments with state-of-the-art detectors means that SPICA can provide a huge advance on the capabilities of previous missions.The SPICA instrument complement offers spectral resolving power ranging from R ∼50 through 11000 in the 17-230 µm domain as well as R ∼28.000 spectroscopy between 12 and 18 µm. Additionally SPICA will be capable of efficient 30-37 µm broad band mapping, and small field spectroscopic and polarimetric imaging in the 100-350 µm range. SPICA will enable far infrared spectroscopy with an unprecedented sensitivity of ∼ 5 × 10 −20 W/m 2 (5σ/1hr) -at least two orders of magnitude improvement over what has been attained to date. With this exceptional leap in performance, new domains in infrared astronomy will become accessible, allowing us, for example, to unravel definitively galaxy evolution and metal production over cosmic time, to study dust formation and evolution from very early epochs onwards, and to trace the formation history of planetary systems.

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Development of Ultra-Low-Noise TES Bolometer Arrays

Cited by 31 publications

References 11 publications

Development of frequency domain multiplexing for the X-ray Integral Field unit (X-IFU) on the Athena

Development of frequency domain multiplexing for the X-ray Integral Field unit (X-IFU) on the Athena

Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

SPICA—A Large Cryogenic Infrared Space Telescope: Unveiling the Obscured Universe

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