Development of Ultrasonic Pulsed Plasma Jet Source for Remote Surface Treatment

Abstract

We have developed a supersonic pulsed plasma jet device capable of long-distance and high-speed processing, and investigated its basic characteristics for surface treatment applications, mainly in the material and medical fields. The developed apparatus is equipped with a mechanism to transport active species in the plasma to the object to be treated by jetting the generated high-density plasma outward with supersonic pulse jets, which allows the gas flow velocity to increase significantly during pulse jetting compared with plasma generation. This enables the active species in the plasma to reach the treatment target before deactivation, thereby realizing surface treatment at a distance. Measurements using the Schlieren method revealed that the velocity of the jet flow reached Mach 1.7.

Deposition of a polymer thin film on a silver surface for surface plasmon sensing

“…We evaporated For PMMA thin film deposition on the silver surface, we modified the properties of the silver surface before spin coating to enhance the hydrophilicity because a droplet of PMMA toluene solution rolled around the surface; 19) we treated the surface using atmospheric low-temperature plasma. [20][21][22] Figure 4 shows the employed plasma treatment system. Ar gas with a 3 l/min was inserted through the glass tube (inner and outer diameters: 3 mm and 5 mm) to the electrodes.…”