The aim of the research was to investigate the influence of strontium on the structure of thin films La1-xSrxFeO 3 (x = 0; 0,1; 0,2). The LaFeO 3 and Sr-doped LaFeO3 films were produced by pulsed laser deposition (PLD) on Si (100) substrate using the Nd-YAG (λ = 266 nm) laser. SEM, AFM and XRD methods were used to characterize the structure and morphology of the thin films. X-Ray Diffraction analysis showed only the LaFeO 3 phase in the undoped thin film and the La0.9Sr0.1O 3 and La0.8Sr0.2O 3 phases in thin films doped by Sr. The mean crystallite size, calculated by Williamson-Hall method, was smaller (of the order of 18 nm) in films doped by Sr. SEM analysis showed small droplets in thin films doped by Sr. Highly developed surface layer was observed using the AFM microscope for thin films doped by Sr.Keywords: Perovskite LaFeO 3 , thin films, gas sensors, PLD on the surface structure of thin films by modification of process parameters. it were found optimal conditions for the deposition of nanocrystalline thin films of LaCoO 3 doped by Sr using laser ablation method. The study of the influence of Sr doping on the structure of LaFeO 3 thin films deposited by PLD is presented in this paper.
Experimental
Preparation of targetsThe undoped LaFeO 3 targets were purchased from the Kurt J. Lesker Company. The powders of La1-xSrxO 3 (x = 0.1, 0.2) were prepared by mechanical alloying method. The powders La1-xSrxO 3 multiphase La 2 O 3 , La(OH) 3 , La1-xSrxFeO 3 (x = 0, 0.1, 0.2) were milled in ball mill during t = 2, 4, 6, 10 hours using ZrO 2 balls. The powders were dried at temperature 973 K during 4 hours. Then, the targets were prepared by compacting the powders of La1-xSrxFeO 3 under a pressure of p = 10 9 Pa during 5 min then the pellets were sintered at T = 1623°K during 10 h.
Deposition of thin filmsThe La1-x SrxCoO 3 (x = 0, 0.1, 0.2) thin films were deposited on (100) oriented Si substrate using a laser ablation system equipped with the Nd-YAG (266 nm) laser and the chamber