Development of YBa/sub 2/Cu/sub 3/O/sub y/ tape by using inclined substrate method

Sato, Y.; Takahashi, Yoshihisa; Muranaka, K.; Fujino, K.; Hahakura, S.; Ohmatsu, K.; Takei, H.

doi:10.1109/77.919784

Cited by 10 publications

(6 citation statements)

References 14 publications

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“…We note here, that the tilt reported by Bjurström et al of [28][29][30] is smaller than what we find experimentally. It is also smaller than the tilt c ¼ 49 expected under the assumption of r f /r b % 1.…”

Section: A Out-of-plane Orientationcontrasting

confidence: 72%

“…Off-normal deposition has previously been reported to lead to thin films with biaxial texture, 30,31,57 as reviewed by Mahieu et al for several materials with a cubic crystal structure. 29 They proposed a 2D model where in-plane preferred orientation develops primarily in the early stages of growth during a competitive nuclei growth process facilitated by adatom internuclei diffusion and diffusion on the substrate.…”

Section: B In-plane Orientationmentioning

confidence: 99%

“…Biaxial texture denotes grain orientation distributions in polycrystalline films where the grains not only exhibit a preferred orientation along the growth direction but are also aligned in the in-plane (lateral) direction. Biaxial texture has been reported for various materials with cubic crystal structures, including sputter deposited TiN and YSZ with a ¼ 65 , 29 and 40 -60 , 30 respectively, and MgO evaporated from 35 to 57 . 31 Dellas and Harper have deposited AlN by dc reactive magnetron sputtering in a Ar/N 2 gas mixture and found that a deposition angle of a ¼ 42 causes the c-axis of AlN to tilt by 45 6 10 toward the deposition flux, whereas a ¼ 64 results in the development of a secondary grain orientation that is titled by 60 6 5 , opposite to the flux.…”

Section: Introductionmentioning

confidence: 98%

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Biaxial texture development in aluminum nitride layers during off-axis sputter deposition

Deng¹,

Muralt²,

Gall³

2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Polycrystalline aluminum nitride (AlN) layers were deposited by pulsed-dc reactive magnetron sputtering from a variable deposition angle a ¼ 0-84 in 5 mTorr pure N 2 at room temperature. Xray diffraction pole figure analyses show that layers deposited from a normal angle (a ¼ 0) exhibit fiber texture, with a random in-plane grain orientation and the c-axis tilted by 42 6 2 off the substrate normal, yielding wurtzite AlN grains with the f10 12g plane approximately parallel (62) to the substrate surface. However, as a is increased to 45 , two preferred in-plane grain orientations emerge, with populations I and II having the c-axis tilted toward and away from the deposition flux, by 53 6 2 and 47 6 1 off the substrate normal, respectively. Increasing a further to 65 and 84 , results in the development of a single population II with a 43 6 1 tilt. This developing biaxial texture is attributed to a competitive growth mode under conditions where the adatom mobility is sufficient to cause intergrain mass transport, but insufficient for the thermodynamically favored low energy {0001} planes to align parallel to the layer surface. Consequently, AlN nuclei are initially randomly oriented and form a kinetically determined crystal habit exposing {0001} and f11 20g facets. The expected direction of its highest growth rate is 49 6 5 tilted relative to the c-axis, in good agreement with the 42-53 measured tilt. The in-plane preferred orientation for a > 0 is well explained by the orientation dependence in the cross section of the asymmetric pyramidal nuclei to capture directional deposition flux. The observed tilt is ideal for shear mode electromechanical coupling, which is maximized at 48. V

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Section: A Out-of-plane Orientationcontrasting

confidence: 72%

Section: B In-plane Orientationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 98%

See 1 more Smart Citation

Biaxial texture development in aluminum nitride layers during off-axis sputter deposition

Deng¹,

Muralt²,

Gall³

2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…YBCO films are mainly fabricated by physical vapor deposition routes, such as pulsed laser ablation or sputtering. 5,6 Although they can produce fairly good YBCO films relatively easily, these processes have some drawbacks in terms of cost performance for mass production: they require expensive vacuum chambers, and the reproducibility of the critical current density ͑J c ͒ of the YBCO films is not good enough because of the essential difficulty of controlling the composition. On the other hand, as a chemical route, metalorganic deposition has been studied for a long time, because it does not require a vacuum system and enables low-cost mass production of YBCO films.…”

Section: Introductionmentioning

confidence: 99%

Growth model and the effect of CuO nanocrystallites on the properties of chemically derived epitaxial thin films of YBa2Cu3O7−x

Araki

Niwa

Yamada

et al. 2002

Journal of Applied Physics

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“…58,[62][63][64][65][66][67] Recent results for long lengths of coated conductors are promising. * Reel-toreel deposition of YBa 2 Cu 3 O 7-δ with endto-end I c > 10 A for a 4.5 m tape and I c = 62 A (1 cm tape width) for shorter lengths and a film thickness of 4 µm were reported by Sato et al 68 Y. Iijima's group (Fujikura Ltd.) reported on a 9.6 m long carrying an I c = 50 A (1 cm tape width), corresponding to a current density J c = 0.42 MA/cm 2 . On a shorter length of 8 cm (for which the buffer layer was deposited at a slower rate), I c = 140 A (1 cm tape width, corresponding to J c = 1.2 MA/cm 2 ) was measured.…”

Section: Pulsed Laser Deposition Of Yba 2 Cu 3 O 7-δ δ δ δmentioning

confidence: 69%

Pulsed Laser Deposition of YBa2Cu2O7−δ for Coated Conductor Applications: Current Status and Cost Issues

Christen

Second-Generation HTS Conductors

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INTRODUCTIONAmongst the numerous techniques currently being tested for the fabrication of coated conductors (i.e. high-temperature superconducting oxides deposited onto metallic tapes), pulsed laser deposition (PLD) plays a prominent role. Recent results from groups in the United States (e.g. Los Alamos National Laboratory), Europe (e.g. University of Göttingen), and Japan (e.g. Fujikura Ltd.) are most promising, yielding record numbers for J c and I c .As a method for depositing films of complex materials, such as the high-temperature superconductors (HTS) relevant to this chapter, PLD is well established and conceptually simple. Issues that have kept PLD from becoming a successful technique for devices and optical materials, namely particulate formation and thickness non-uniformities, are much less of a concern in the fabrication of HTS tapes. Nevertheless, the approach still presents ongoing challenges in the fundamental understanding of the laser-target interaction and growth from the resulting energetic plasma plume. Numerous issues related to the scale-up, control, reproducibility, and economic feasibility of PLD remain under investigation.It is clearly beyond the scope of this short chapter to give a complete treatise of such a complex subject -fortunately, several excellent reviews have already been published. 1-3 It is thus the intent of the author to introduce PLD only briefly and with a strong focus on HTS deposition, summarizing the most important developments and referring the reader to the numerous cited works. A strong emphasis is placed on issues related to scale-up.Finally, it is the goal of this chapter to introduce a preliminary cost-analysis of PLD for coated conductor fabrication. While an attempt to calculate the total cost of fabricating a length of superconducting tape would be beyond the scope of this chapter (and beyond our current knowledge of numerous issues), we can present a rather detailed analysis of the 2 cost of laser operation. The point, of course, is not to show that PLD is either cheaper or more expensive than other techniques -in fact, for most other techniques, which have not been successfully applied to long length fabrication, such a calculation cannot yet be made. It is illustrative, for example, to consider that in an industrial setting, more meters of coated tape will have to be produced per day than some other methods have produced in their entire history, and that therefore many reliability issues (including mean-time between failure of equipment) have not been addressed for many of the approaches described in this book. It is the maturity of industrial laser technology combined with the maturity of the PLD process that allows us to estimate these costs for this technique.

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Development of YBa/sub 2/Cu/sub 3/O/sub y/ tape by using inclined substrate method

Cited by 10 publications

References 14 publications

Biaxial texture development in aluminum nitride layers during off-axis sputter deposition

Biaxial texture development in aluminum nitride layers during off-axis sputter deposition

Growth model and the effect of CuO nanocrystallites on the properties of chemically derived epitaxial thin films of YBa2Cu3O7−x

Pulsed Laser Deposition of YBa2Cu2O7−δ for Coated Conductor Applications: Current Status and Cost Issues

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