Developments in Advanced Packaging Failure Analysis using Correlated X-Ray Microscopy and LaserFIB

Viswanathan, Vignesh; Jiao, Longan

doi:10.1109/eptc53413.2021.9663938

Cited by 6 publications

(3 citation statements)

References 10 publications

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“…Even for ROI targets that are significantly smaller than the grid spacing, their precise locations can be effectively communicated by describing micron-scale distances, measurable from the XRM data, to the sides or corners of any given grid cell. While similar approaches using XRM alone 24,25,32 or in combination with laser-patterned rulers to target subsurface features in bulk materials have been reported before 33 , our approach with a laser-patterned coordinate grid offers a much more comprehensive communication system through its full-sample coverage and alphanumerically labelled axes. The laser ablation process described herein is efficient, requiring minimal ablation time of 80 seconds in this case, and can be tailored to accommodate various grid spacings, rotations, and specimen shapes within the 40 × 40 mm LaserFIB scan field.…”

Section: A Fs Laser-patterned Coordinate Grid To Assist the Linking O...mentioning

confidence: 88%

Characterization of human trabecular bone across multiple length scales: A correlative approach combining X-ray tomography with LaserFIB and plasma FIB-SEM

Tang,

Casagrande,

Mohammadpour

et al. 2024

Preprint

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Three-dimensional correlative multimodal and multiscale imaging is an emerging method for investigating the complex hierarchical structure of biological materials such as bone. This approach synthesizes images acquired across multiple length scales, for the same region of interest, to provide a comprehensive view of the material structure of a sample. Here, we develop a workflow for the structural analysis of human trabecular bone using a femtosecond laser to produce a precise grid to facilitate correlation between imaging modalities and identification of structures of interest, in this case, a single trabecula within a volume of trabecular bone. Through such image registration, high resolution X-ray microscopy imaging revealed fine architectural details, including the cement line and bone cell lacunae of the selected bone unit. The selected bone volume was exposed with a combination of manual polishing and site-specific femtosecond laser ablation and then examined with plasma focused ion beam-scanning electron microscopy. This reliable and versatile correlation approach has the potential to be applied to a variety of biological tissues and traditional engineered materials. The proposed workflow has the enhanced capability for generating highly resolved structural data for a better understanding of the architectural features of a material spanning its macroscopic to nanoscopic levels.

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Section: A Fs Laser-patterned Coordinate Grid To Assist the Linking O...mentioning

confidence: 88%

Characterization of human trabecular bone across multiple length scales: A correlative approach combining X-ray tomography with LaserFIB and plasma FIB-SEM

Tang,

Casagrande,

Mohammadpour

et al. 2024

Preprint

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show abstract

“…Commercial standalone laser systems implementing ultra-short-pulsed lasers specifically for sample preparation are effective for large-area preparation and package dissection but lack optimization for the fastest targeted microscopy preparation where ablation speed and sample quality are simultaneously important, since vacuum environments produce the best laser ablation and sample quality, in turn enabling efficiency for the subsequent FIB polishing steps. In contrast, the integrated LaserFIB approach has proven efficient and effective in correlative workflows with optical or XRM microscopy for a variety of research and industrial applications, including characterization of microbumps in a 3D package (14), development of automotive bumpers from recycled materials (15), correlative microscopy for rapid screening of Zr-containing particles for geochronology (16), and identification of random particles within an OLED display (17). Figure 8.…”

Section: Advances In Focused Ion Beam Scanning Electron Microscopesmentioning

confidence: 99%

“…This example involved iterations of two-hour 3D XRM scans to aid process set-up and confirm target accuracy. In this case, the entire XRM to LaserFIB workflow took less than one day (17). Figure 13 shows the steps of the workflow.…”

Section: Advances In Focused Ion Beam Scanning Electron Microscopesmentioning

confidence: 99%

Emerging Technologies for Advanced 3D Package Characterization to Enable the More-Than-Moore Era

Hartfield¹,

Harris²,

Gu³

et al. 2022

ECS Trans.

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The line between packaging and silicon interconnect technology is blurring due to a reduction in package interconnect dimensions, which drives an increase in image resolution requirements. It is becoming more difficult to localize and image defects and structures throughout the packaging life cycle, from materials selection, through package and silicon design co-optimization, development, production, and field failure diagnostics. Characterization and failure analysis (FA) solutions must provide fast results for rapid development of packages meeting the required electrical, mechanical and reliability specifications with high yield and quality. Heterogeneous integration and complex packages containing multiple die drive new approaches to rapidly characterize structures, defects and processes. This paper presents new artificial intelligence (AI) developments in 3D X-ray microscopy (XRM) for non-destructive submicron-resolution imaging of packages. It also introduces the latest developments in focused ion beam (FIB) microscopes adapted with an integrated fs-laser for precise and fast analysis of deeply buried features in advanced packages.

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Characterization of human trabecular bone across multiple length scales using a correlative approach combining X-ray tomography with LaserFIB and plasma FIB-SEM

Tang,

Casagrande,

Mohammadpour

et al. 2024

Sci Rep

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Developments in Advanced Packaging Failure Analysis using Correlated X-Ray Microscopy and LaserFIB

Cited by 6 publications

References 10 publications

Characterization of human trabecular bone across multiple length scales: A correlative approach combining X-ray tomography with LaserFIB and plasma FIB-SEM

Characterization of human trabecular bone across multiple length scales: A correlative approach combining X-ray tomography with LaserFIB and plasma FIB-SEM

Emerging Technologies for Advanced 3D Package Characterization to Enable the More-Than-Moore Era

Characterization of human trabecular bone across multiple length scales using a correlative approach combining X-ray tomography with LaserFIB and plasma FIB-SEM

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