Developments in the design of a spectroscopic scanning electron microscope

Khursheed, Anjam; Osterberg, Mans

doi:10.1016/j.nima.2005.11.063

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The Beam Separator1

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Cited by 8 publications

(2 citation statements)

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“…The excitations on the inner and outer plates necessary to provide the stigmatic focusing condition for a 10 keV primary beam deflected through 901 are 85.85 AT and À12.14 AT respectively, more details on this are given in Refs. [2,4]. Here the magnetic field distribution in the beam separator is solved by using the finite-element method in combination with a Fourier-Bessel series.…”

Section: The Beam Separatormentioning

confidence: 99%

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Redesign of the scanning electron microscope for parallel energy spectral acquisition

Khursheed

Hoang

2008

Ultramicroscopy

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Section: The Beam Separatormentioning

confidence: 99%

“…Recently, a ''Spectroscopic scanning electron microscope (SEM)'' proposal made by Khursheed et al [1,2] describes the possibility of redesigning the SEM so that it can capture the entire energy range of scattered electrons that leave the specimen. The new design, depicted in Fig.…”

Section: Introductionmentioning

confidence: 99%