Device Array Scribe Characterization Vehicle Test Chip for Ultra Fast Product Wafer Variability Monitoring

Hess, Christopher P.; Saxena, Sharad; Karbasi, H.; Subramanian, S.; Quarantelli, M.; Rossoni, Aquiles; Tonello, Sarah; Zhao, Sa; Slisher, D.

doi:10.1109/icmts.2007.374472

Cited by 18 publications

(1 citation statement)

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“…Multiple test structures were measured per each die, and all dies were tested for increased statistics and wafer failure maps. The test was executed on a proprietary parallel tester [6].…”

Section: Resultsmentioning

confidence: 99%

Gated contact chains for process characterization in FinFET technologies

Brozek

Lam

et al. 2014

2014 International Conference on Microelectronic Test Structures (ICMTS)

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Contact Chain is a well known element of the diagnostic set of test structures used across many generations of silicon processes. Implementation of such test structures becomes challenging in new technologies with 3D devices, like FinFET. Contacts to active regions of such devices are inherently dependent on the architecture of epitaxial raised source and drain and for proper characterization require the presence of transistor gates, which set the environment for contacts. This paper describes examples of test structures for contact process development for FinFET technologies. Instead of simple chain of contacts, each structure contains a series of active devices with common gate electrode used to turn on the chain of transistors to enable measurement of chain resistance. To discriminate between chain failures caused by an open contact or by other mechanisms (e.g. bad transistor with very high threshold voltage) a series of measurement under various test conditions is performed and analysed to extract the contact failure rate. We also demonstrate the application of such structures in FinFET process characterization.

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“…Multiple test structures were measured per each die, and all dies were tested for increased statistics and wafer failure maps. The test was executed on a proprietary parallel tester [6].…”

Section: Resultsmentioning

confidence: 99%