Device scaling vs. process control scaling: Advanced sensorization closes the gap — Alan Weber

Finlay, Boyd; Reath, Mark; Downey, Jack Lee; Reeves, Chris; Wood, Jeff; Minton, Patrick; Rackwitz, Niels; Warren, Eric; Conerny, Brian; Elmrabet, Mohamed; Bunkofske, Ray

doi:10.23919/issm.2017.8089091

2017 Joint International Symposium on E-Manufacturing and Design Collaboration (eMDC) &Amp; Semiconductor Manufacturing (ISSM) 2017

DOI: 10.23919/issm.2017.8089091

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Device scaling vs. process control scaling: Advanced sensorization closes the gap — Alan Weber

Boyd Finlay¹,

Mark Reath²,

Jack Lee Downey³

et al.

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Device scaling vs. process control scaling: Advanced sensorization closes the gap — Alan Weber

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