Abstract:Defects cluster, and the probability of a multiple fault is significantly higher than just the product of the single fault probabilities. While this observation is beneficial for high yield, it complicates fault diagnosis. Multiple faults will occur especially often during process learning, yield ramp-up and field return analysis.In this paper, a logic diagnosis algorithm is presented which is robust against multiple faults and which is able to diagnose multiple faults with high accuracy even on compressed tes… Show more
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