Effects of the vicinal angle, film thickness, and temperature on the growth modes, microstructures, and electrical properties of YBa 2 Cu 3 O 7−␦ on SrTiO 3 were studied. Island growth transition between the initial nucleation and the later coalescence stages was observed with film thickness on a planar SrTiO 3 , while no islands were observed at the later stage due to the step-flow mode. As the growth temperature increased, a-axis precipitates were transformed to c-axis precipitates (islands), while no islands formed on vicinal SrTiO 3 . The supercurrent critical temperature was strongly related to the substrate vicinal angle due to the step-flow mode.