Diagnostic Techniques for Electrical Discharge Plasma Used in PVD Coating Processes

Abstract

This article discusses the possibilities of two methods for monitoring Physical Vapor Deposition (PVD) process parameters: multi-grid probe, which makes it possible, in particular, to determine the energy distribution of ions of one- or two-component plasma and spectrum analyzer of the glow discharge plasma electromagnetic radiation signal based on the Prony–Fourier multichannel inductive spectral analysis sensor. The energy distribution curves of argon ions in the low-voltage operation mode of ion sources with closed electron current have been analyzed. With a decline in the discharge current, the average ion energy decreases, and the source efficiency (the ratio of the average ion energy W to the discharge voltage U) remains approximately at the same level of W/U ≈ 0.68, …, 0.71 in the operating voltage range of the source. The spectrum analyzer system can obtain not only the spectra at the output of the sensor, but also the deconvolution of the spectrum of the electromagnetic radiation signal of the glow discharge plasma. The scheme of a spectrum analyzer is considered, which can be used both for monitoring and for controlling the processing process, including in automated PVD installations.

Recognition of Ethylene Plasma Spectra 1D Data Based on Deep Convolutional Neural Networks

“…However, as the integration density and complexity of semiconductor devices continue to increase in integrated circuits [6], the shrinking size imposes increasingly stringent requirements on the precision of processes such as etching and materials processing [7,8]. And it is an indispensable means of developing some diagnostics for process technologies at a higher level in the plasma industry [9][10][11].…”

Technologies of Coatings and Surface Hardening: Industrial Applications

“…The quality of the surface where the coating is supposed to be deposed plays a critical role in the product's durability [17] when special measures can reduce the adhesion of the workpiece material and favor the descent of material flow on the tool face [24]. The questions of reliable coating deposition diagnostics remain open and require special measures [27].…”

“…Tool surface conditions and micro-texturing on machining performance of hardened steel [17] and heat-resistant alloy [24], correspondingly; • Self-healing adaptive coatings in milling titanium alloys [23], protective coatings for microelectronic needs [26], diagnostics of the coating deposition process [27];…”

“…Coating technologies such as physical vapor deposition (PVD) [17,23,24,27], including a radio frequency magnetron sputtering [16], high-power impulse magnetron sputtering [18], a closed-field unbalanced magnetron sputtering [19,20], filtered cathodic vacuum arc deposition [21,22,25], as well as atomic layer deposition [26]; • Full-scale tests in conditions close to industrial ones in milling hardened steel 100CrMn6 [17] and titanium alloys [23], turning steel 1045 [22], nickel-chromium alloy [21,25], and ironnickel alloy [24], annealing tests [19,20], open/short tests for electronic components [26]; • Development of a mathematical basis for future research [23,24].…”

“…The diagnostic methods concerning the flow of technology processing in a vacuum for solid bodies' surface modification are shown in [27]. The analysis of energy distribution curves shows that the average ion energy decreases with a decrease in the discharge current, and the ratio of the average ion energy to the discharge voltage is approximately 0.68-0.71.…”