1998
DOI: 10.1088/0741-3335/40/7/002
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Diagnostics of low-density glow discharge plasmas using Thomson scattering

Abstract: In recent years, the method of incoherent Thomson scattering has been applied to make measurements of electron properties of glow discharges used for industrial applications. These plasmas have electron density of the order of 10 17 m −3 and electron temperature of a few eV. This paper reviews the recent progress in this research area. Details of the experimental systems are given and examples of measurements made in several different types of glow discharges are presented. A method in which Thomson scattering… Show more

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Cited by 98 publications
(79 citation statements)
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“…We first describe how these densities are extracted from experimental spectra, and then discuss the limitations of the data inversion and how quantitative comparisons with the model predictions are best made. The elec- tron density is an important plasma parameter, but precise measurements are challenging: under conditions of high electron density, interferometric methods 39 or Thomson scattering 11,40 can be used. At the relatively low electron densities of the arc jet reactor plume, however, we instead retrieve electron densities from the Stark broadening of atomic absorption lines.…”
Section: Results Of the Experimental Measurementsmentioning
confidence: 99%
“…We first describe how these densities are extracted from experimental spectra, and then discuss the limitations of the data inversion and how quantitative comparisons with the model predictions are best made. The elec- tron density is an important plasma parameter, but precise measurements are challenging: under conditions of high electron density, interferometric methods 39 or Thomson scattering 11,40 can be used. At the relatively low electron densities of the arc jet reactor plume, however, we instead retrieve electron densities from the Stark broadening of atomic absorption lines.…”
Section: Results Of the Experimental Measurementsmentioning
confidence: 99%
“…From this point of view, Laser Thomson Scattering (LTS) can be a solution, offering reliable and spatially resolved electron temperature and density measurements [3].…”
Section: Thomson Scattering Measurements Of Helium Recombining Plasmamentioning
confidence: 99%
“…n e values obtained by LTS were consistent with those found by Optical Emission Spectroscopy. Diode Laser Absorption Spectroscopy (DLAS) was used for spatially resolved measurements of argon metastable Ar(1s 5 ) density in argon microdischarges. The analysis of the absorption lineshapes also provided the gas temperature.…”
Section: Discussionmentioning
confidence: 99%
“…In most laser scattering experiments light is detected at an angle of θ =90° with respect to the laser beam axis [2][3][4][5]. In a slot-type microdischarge with a long, deep, and narrow gap, the z-axis [1] is the most appropriate direction of propagation of a tightly focused laser beam, as well as for detection of the scattered light.…”
Section: Methodsmentioning
confidence: 99%