Diagnostics of molecular plasmas and trace gas analysis using mid infrared lasers

Röpcke, J.; Davies, Paul; Glitsch, S; Hempel, F.; Lang, N.; Nägele, M.; Rousseau, Antoine; Wege, S.; Welzel, S.

doi:10.1117/12.813579

Cited by 1 publication

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“…'Turn-Key' operation and unattended remote monitoring and control at an improved safety level and at a low level of maintenance and logistics could be achieved. These positive features of QCLAS systems can open up new fields of application in research and industry, including studies of gases in atmospheric, environmental and plasma applications, but also to study and monitor industrial plasma processes [20][21][22].…”

Section: Introductionmentioning

confidence: 99%

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Hempel

Lang

Zimmermann

et al. 2010

Meas. Sci. Technol.

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Boron trichloride (BCl 3 ) is used as a source gas in various industrial plasma applications. The online monitoring of its ground state concentration in the plasma process reactor is vital for improved insight into the plasma chemistry and to increase productivity, reliability and reproducibility of the process. Infrared absorption spectroscopy was applied for in situ measurements of absolute densities of BCl 3 and HCl in planar microwave plasma sources as well as in an industrial pulsed dc discharge reactor. In this paper procedures for the determination of HITRAN format line strength data files for BCl 3 are described together with results of concentration measurements. The results show the influence of the discharge parameters on the dissociation of BCl 3 and its conversion to HCl. Observations using tuneable diode lasers are compared with measurements using quantum cascade lasers and the applicability of this diagnostic technique for industrial plasma process monitoring is shown.

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Section: Introductionmentioning

confidence: 99%

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Hempel

Lang

Zimmermann

et al. 2010

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

Diagnostics of molecular plasmas and trace gas analysis using mid infrared lasers

Cited by 1 publication

References 45 publications

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

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Diagnostics of molecular plasmas and trace gas analysis using mid infrared lasers

Cited by 1 publication

References 45 publications

Plasma process monitoring of BCl3using high-resolution infrared laser absorption spectroscopy

Plasma process monitoring of BCl3using high-resolution infrared laser absorption spectroscopy

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Product

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Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy