2004
DOI: 10.1103/physrevlett.93.185001
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Diagnostics of the Electronegative Plasma Sheath at Low Pressures Using Microparticles

Abstract: Levitated particles are a new powerful diagnostic of the midplasma sheath region. They can reveal features undetectable either to plasma or to surface measurements. The equilibrium position of microparticles suspended in an oxygen plasma sheath, together with a model of the levitation force and Langmuir probe measurements, gives evidence of secondary electropositive plasmas in the already established plasma sheath, in the range of parameters where the modified Bohm criterion breaks down into multiple solutions. Show more

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Cited by 48 publications
(36 citation statements)
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“…It is now known that electronegative plasmas are not pure in general, but are contaminated (in most cases) by dust (solid impurities). The dust (solid impurities) are not practically neutral, but are charged (Shukla and Eliasson 2009) by absorbing electrons, positive as well as negative ions Rosenberg and Merlino 2007;Kim and Merlino 2006;Merlino and Kim 2006;Annaratone and Allen 2005;Annaratone et al 2004;D'Angelo 2004;Mamun and Shukla 2003). Therefore, the electronegative plasmas are also called dirty or dusty electronegative plasma Rosenberg and Merlino 2007;Kim and Merlino 2006;Merlino and Kim 2006;Annaratone and Allen 2005;Annaratone et al 2004;D'Angelo 2004;Mamun and Shukla 2003).…”
Section: ; Franklin 2002mentioning
confidence: 97%
“…It is now known that electronegative plasmas are not pure in general, but are contaminated (in most cases) by dust (solid impurities). The dust (solid impurities) are not practically neutral, but are charged (Shukla and Eliasson 2009) by absorbing electrons, positive as well as negative ions Rosenberg and Merlino 2007;Kim and Merlino 2006;Merlino and Kim 2006;Annaratone and Allen 2005;Annaratone et al 2004;D'Angelo 2004;Mamun and Shukla 2003). Therefore, the electronegative plasmas are also called dirty or dusty electronegative plasma Rosenberg and Merlino 2007;Kim and Merlino 2006;Merlino and Kim 2006;Annaratone and Allen 2005;Annaratone et al 2004;D'Angelo 2004;Mamun and Shukla 2003).…”
Section: ; Franklin 2002mentioning
confidence: 97%
“…This correlation analysis of the dust equilibrium position combined with the spatial electric field profile is applicable as a diagnostic tool to estimate plasma parameters, i.e. the dust particles can serve as electrostatic probes [38,39,[92][93][94]. The correlation analysis yields the maximum sheath extension as the only free fitting parameter, which depends on electron temperature and density (s max,p ∝ λ De /T ).…”
Section: Adiabatic Phase Changementioning
confidence: 99%
“…In all cases the manipulation of dust particles, which is realized by controlling forces exerted on them such as electrostatic, thermophoretic, ion drag, and gravitational forces, or externally applied ones, e.g., created by a laser beam [34][35][36][37], is crucially important. Furthermore, the use of dust particles as probes of these forces revealing plasma properties is a current topic of research [38,39].…”
Section: Introductionmentioning
confidence: 99%
“…Recently, there is a growing interest in the boundary layer structures of multicomponent plasmas, [11][12][13][14][15][16] including complex ͑dusty͒ plasmas [13][14][15] and electronegative plasmas, 16 since the regions are sensitive to plasma-surface interactions. In plasma etching and deposition, for instance, the contamination problem caused by the charged dust has always been a major concern.…”
Section: Introductionmentioning
confidence: 99%