Diamond like carbon coatings doped by Si fabricated by a multi-target DC-RF magnetron sputtering method - Mechanical properties, chemical analysis and biological evaluation

Bociaga, Dorota; Sobczyk-Guzenda, Anna; Szymański, W.; Jędrzejczak, Anna; Jastrzębska, Aleksandra; Olejnik, Alicja K.; Świątek, L.; Jastrzębski, K.

doi:10.1016/j.vacuum.2017.06.027

Cited by 40 publications

(32 citation statements)

References 55 publications

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“…Ultrafast optical processes were studied by a transient absorption spectrometer HARPIA (Light Conversion, Vilnius, Lithuania). A more thorough description of the used measurement system can be found in [12].…”

Section: Ar Gas Flow (Sccm)mentioning

confidence: 99%

“…Properties of DLC films can be additionally controlled by introducing chemical elements other than carbon or hydrogen [1,[3][4][5][6][7][8]. Particularly, silicon is one of the most often used DLC dopants [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23]. Reduced internal stress and friction coefficient, as well as increased thermal resistance, while keeping high hardness of Si doped diamond-like carbon films were reported [9].…”

Section: Introductionmentioning

confidence: 99%

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Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

et al. 2020

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In the present research diamond-like carbon (DLC) films containing 4–29 at.% of silicon were deposited by reactive magnetron sputtering of carbon target. Study by X-ray photoelectron spectroscopy revealed the presence of Si–C bonds in the films. Nevertheless, a significant amount of Si–O–C and Si–Ox bonds was present too. The shape of the Raman scattering spectra of all studied diamond-like carbon containing silicon (DLC:Si) films was typical for diamond-like carbon. However, some peculiarities related to silicon doping were found. Studies on the dependence of DLC:Si of the optical transmittance spectra on the Si atomic concentration have shown that doping by silicon affects linear, as well as nonlinear, optical properties of the films. It is shown that the normalized reflectance of DLC:Si films decreased with the increased exciting light fluence. No clear relation between the normalized reflectance and photoexcited charge carrier relaxation time was found. It was suggested that that the normalized reflectance decrease with fluence can be related to nonlinear optical properties of the hydrogenated diamond-like carbon phase in DLC:Si film.

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Section: Ar Gas Flow (Sccm)mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

et al. 2020

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“…In order to improve the tribological properties and reduce the coefficient of friction, some additions can be added to the DLC matrix, for example, silicon, titanium, tungsten etc. [6]. In comparison to DLC, good results, particularly in the humid atmospheres, can be observed for high ranges of silicon (10÷40%).…”

Section: Introductionmentioning

confidence: 87%

“…DLC is a metastable amorphous form of carbon, with a predominance of sp 3 bonds. These coatings are characterised by high hardness, wear resistance, chemical and electrochemical resistance, low coefficient of friction and biocompatibility [1,2,[4][5][6][7]. The main variables in DLC coatings are the carbonisation hybridisation (sp 1 , sp 2 and sp 3 ) and hydrogen H content [8].…”

Section: Introductionmentioning

confidence: 99%

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Structure and tribological properties of DLC:Si/AlCrN low friction thin film

2019

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A wide range of diamond-like carbon coatings is caused by their structure composed of sp2 and sp3 carbon hybridisation and the possibility of both metallic and non-metallic admixtures or the creation of a hydrogenated form. One of the ways to improve the tribological properties of DLC is to dope it with silicon. Deposited on stainless steel substrate coating system composed of AlCrN film covered by DLC:Si was the subject of the studies. The AlCrN and DLC:Si layers were deposited by PVD lateral rotating ARC-cathodes and PACVD on the X6CrNiMoTi17-12-2 steel respectively. Characteristics of DLC:Si film was performed by imaging the topography using SEM and AFM. The structure was investigated using a Raman spectroscopy and HRTEM. Tribological and adhesion tests were carried out using a ball-on-disc and a scratch test respectively. Tests using the TEM confirmed an amorphous character of DLC:Si layer. A phase composition analysis of the DLC:Si layer with the Raman spectroscopy method showed the presence of bonds distinctive for diamond (sp3) and graphite (sp2), typically observed in DLC coatings. Under the technically dry friction conditions, the friction coefficient for the associations tested is within the range 0.14 for the investigated coating.

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Influence of the Chemical Composition and Topography of the Ti6Al7Nb Surface Etched in Fluorine Plasma on Its Selected Properties

2023

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Herein, a new way of the surface modification of Ti6Al7Nb alloy in fluorine plasma is presented using the mask made of stainless steel and its influence on the selected properties, including chemical composition, topography, and tribological ones. Depending on the etching process parameters, different characteristics of the surfaces are obtained. The higher is the value of the negative bias, the less fluorine concentration on the etched surface and higher etching rates. Etching using the SF6 gas shows bigger etching rates in comparison to the etching using the CF4 gas. Chemical composition of the modified surfaces shows greater impact on tribological characteristics than topography parameters. The lowest wear rate is observed for the sample modified using the CF4 gas.

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Diamond like carbon coatings doped by Si fabricated by a multi-target DC-RF magnetron sputtering method - Mechanical properties, chemical analysis and biological evaluation

Cited by 40 publications

References 55 publications

Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

Structure and tribological properties of DLC:Si/AlCrN low friction thin film

Influence of the Chemical Composition and Topography of the Ti6Al7Nb Surface Etched in Fluorine Plasma on Its Selected Properties

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