Diamond-like carbon films prepared by pulsed-laser evaporation

Satō, Tomohiko; Furuno, Shigeo; Iguchi, Satoshi; Hanabusa, Mitsugu

doi:10.1007/bf00617942

Cited by 104 publications

(15 citation statements)

References 19 publications

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“…Figure 4 shows the n-k values for the sample deposited with 1500 pulses. The n values for diamond" 5 and graphite1 6 are also plotted for comparison The thickness of the film as determined by spectroscopic ellipsometry was 1450 nm, consistent with the estimated thickness from summing up the total laser pulses. The result was also confirmed by profilometer measurements.…”

Section: Optical Propertiessupporting

confidence: 64%

Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser

et al. 1993

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We have deposited hydrogen-free diamond-like amorphous carbon films by ArF (193 nm) pulsed laser ablation of graphite. The deposition process is performed with a laser power density of only 5 × 108 W/cm2 at room temperature without any auxiliary energy source incorporation. The resulting films possess remarkable physical, optical, and mechanical properties that are close to those of diamond and distinct from the graphite target used. The films have a mechanical hardness up to 38 GPa, an optical energy band gap of 2.6 eV, and excellent thermal stability. Analysis of electron energy loss spectroscopy reveals the domination of diamond-type tetrahedral bonding structure in the films with the sp3 bond fraction over 95%. Compared with other reported results of pulsed-laser-deposited diamond-like carbon films, our experimental results confirm that the laser wavelength or photon energy plays a crucial role in controlling the properties of the pulsed-laser-deposited diamond-like carbon films.

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Section: Optical Propertiessupporting

confidence: 64%

Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser

et al. 1993

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“…In the past decades, PLD has been proved to be an efficient method for the preparation of a variety of functional thin films [7]. Particularly, the deposition of amorphous carbon films with diamond-like characters has been widely reported by laser ablation of graphite in vacuum [214][215][216][217][218][219][220][221][222][223][224][225][226][227], in which some researchers reported the growth of crystalline particles, but the lack of a diamond peak in Raman spectra was a common result in all reports. It was not until in 1995 that Polo and co-workers [228] first showed the Raman spectroscopy analysis of the sample that is confirmed to have diamond cubic structure of the crystals by the presence of a sharp peak at 1332 cm À1 .…”

Section: Diamond Nanocrystalsmentioning

confidence: 99%

Laser ablation in liquids: Applications in the synthesis of nanocrystals

Yang

2007

Progress in Materials Science

938

363

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“…RS is sensitive to changes in translational symmetry and is thus a powerful tool to characterize the structures of the carbon. 18,19,[26][27][28][29][30][31][32][33] …”

Section: Introductionmentioning

confidence: 99%

Thermal evolution of carbon in annealed Co/C soft x-ray multilayers

Bai

Jiang

Wang

1996

Journal of Applied Physics

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The structures of the carbon sublayers in the annealed Co/C soft x-ray multilayers fabricated using a dual-facing-target sputtering system have been characterized by x-ray diffraction (XRD), transmission electron microscopy (TEM), and Raman spectroscopy (RS). The results suggest that the structural variations in the carbon layers can be roughly divided into three stages, i.e. ordering, crystalline and grain growth stages. In the ordering stage with annealing temperatures below 400 °C, the upward shift of D and G lines in Raman spectra indicates that the amorphous carbon layers are changing from ones with bond-angle disorder and fourfold-bonding only to ones containing threefold-bonding. In the crystalline stage, the amorphous carbon layers in the as-deposited multilayers crystallize to graphite crystallites in the annealing temperature range of 500–600 °C. The rapid increase in the intensity ratio of D line to G line and dramatic decrease in linewidth further confirm this substantial structural change. In the grain growth stage, the specimens are annealed at temperatures higher than 700 °C. The decrease in the intensity ratio implies a growth in the graphite crystallite dimensions, which is consistent with the XRD and TEM results.

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Diamond-like carbon films prepared by pulsed-laser evaporation

Cited by 104 publications

References 19 publications

Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser

Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser

Laser ablation in liquids: Applications in the synthesis of nanocrystals

Thermal evolution of carbon in annealed Co/C soft x-ray multilayers

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