1998
DOI: 10.1016/s0925-9635(97)00201-x
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Diamond-like nanocomposite coatings (a-C:H/a-Si:O) for tribological applications

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Cited by 94 publications
(42 citation statements)
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“…Coefficient of friction of DLN films does not depend monotonically with chemical composition [24] . Lowest and highest reported coefficient of friction ranges were reported as 0.04-0.08 and 0.1-0.2 respectively.…”
Section: Coefficient Of Friction and Wear Resistancementioning
confidence: 87%
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“…Coefficient of friction of DLN films does not depend monotonically with chemical composition [24] . Lowest and highest reported coefficient of friction ranges were reported as 0.04-0.08 and 0.1-0.2 respectively.…”
Section: Coefficient Of Friction and Wear Resistancementioning
confidence: 87%
“…It has been also reported [5] that wear resistance of DLN film is in the range of 0.2 -0.4 compared to wear factor of DLC film 0.5-1. Wear resistance is further decreased with increased concentration of Si and O [24] . In general DLN film has lower residual stress, lower coefficient of friction in dry as well as humid atmospheres.…”
Section: Coefficient Of Friction and Wear Resistancementioning
confidence: 97%
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“…DLN film consists of diamondlike carbon bonds chemically stabilized by hydrogen atoms and quartz-like silicon bonds chemically stabilized by oxygen atoms in a pure amorphous structure. [8][9][10] This films can be deposited by different techniques like plasma enhanced chemical vapor deposition, [9][10][11][12] plasma assisted chemical vapor deposition, 13,14 thermally activated chemical vapor deposition 15 etc. To achieve better film properties, researchers need to investigate the details parameters like precursor flow rate, chamber pressure, substrate temperature, which are very important for good quality microstructure of the films.…”
Section: Introductionmentioning
confidence: 99%