Diamond micro-milling of lithium niobate for sensing applications

Abstract

Lithium niobate (LiNbO 3 ) is a crystalline material which is widely applied in surface acoustic wave, microelectromechanical systems (MEMS), and optical devices, owing to its superior physical, optical, and electronic properties. Due to its low toughness and chemical inactivity, LiNbO 3 is considered to be a hard-to-machine material and has been traditionally left as as an inert substrate upon which other micro structures are deposited. However, in order to make use of its superior material properties and increase efficiency, the fabrication of microstructures directly on LiNbO 3 is in high demand. This paper presents an experimental investigation on the micro machinability of LiNbO 3 via micro milling with the aim of obtaining optimal process parameters. Machining of micro slots was performed on Z-cut LiNbO 3 wafers using single crystal diamond tools. Surface and edge quality, cutting forces, and the crystallographic effect were examined and characterized. Ductile mode machining of LiNbO 3 was found to be feasible at a low feed rate and small depth of cut. A strong crystallographic effect on the machined surface quality was also observed. Finally, some LiNbO 3 micro components applicable to sensing applications were fabricated.

Investigation on the Tool Wear Suppression Mechanism in Non-Resonant Vibration-Assisted Micro Milling

“…Many industrial sections have been striving towards product miniaturization. In order to obtain superior physical, mechanical, optical, and electronic properties, hard and brittle materials, such as titanium alloy, silicon carbide ceramic, and optical glass, have been chosen for micro products, e.g., medical devices, bio-sensors, micro-fluidic chips, to name a few [1,2]. As one of the most efficient micro-manufacturing methods, micro-end milling has shown a great capacity in micro product processing and can generate complex geometries on a wide range of materials.…”

Burr reduction mechanism in vibration-assisted micro milling

“…The demand for micro components and micro-parts with high precision machining accuracy is increasing in many applications, such as medical devices, micro moulds, and microfluidics channels, etc. [1][2][3]. Compared with other micro machining methods, micro milling is recognized as the most flexible micro machining process.…”

Kinematics and tool-workpiece separation analysis of vibration assisted milling

“…High-accuracy precision or micro components are increasingly in demand for various industries, such as biomedical engineering, MEMS, electro-optics, aerospace and communications [1][2][3][4][5]. Previously, non-conventional machining methods such as electrical discharge machining (EDM), electrochemical machining (ECM), laser machining, ion beam machining, and electro-beam machining, are adopted to machine hard and brittle materials.…”