2002
DOI: 10.1016/s0925-9635(01)00619-7
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Diamond microwave micro relay

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Cited by 37 publications
(24 citation statements)
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“…In comparison to the most common semiconductor materials, such as silicon or gallium nitride, their properties are several times better [1]. Currently, diamond devices are used in high power electronics [2], diamond diodes [3], high-power switches [4] or high-frequency devices, such as transistors [5]. However, the most common use of BDD materials is for electrodes in electrochemistry [6][7][8] or spectroelectrochemistry [9].…”
Section: Introductionmentioning
confidence: 99%
“…In comparison to the most common semiconductor materials, such as silicon or gallium nitride, their properties are several times better [1]. Currently, diamond devices are used in high power electronics [2], diamond diodes [3], high-power switches [4] or high-frequency devices, such as transistors [5]. However, the most common use of BDD materials is for electrodes in electrochemistry [6][7][8] or spectroelectrochemistry [9].…”
Section: Introductionmentioning
confidence: 99%
“…Cantilever-based MEMS/NEMS structures such as microcantilever sensors [1,2], microaccelerometers [3], atomic force microscopes (AFM) [4][5][6], microswitches [7,8] etc are widely used. Since their discovery, carbon nanotubes have generated various application ideas due to their remarkable properties.…”
Section: Introductionmentioning
confidence: 99%
“…Diamond is the ideal material for high-performance N/MEMS devices due to its outstanding properties such as its extremely high Young's modulus, the highest hardness, hydrophobic surface, low mass density, the highest thermal conductivity, high corrosion resistance upon caustic chemicals, and biocompatibility. However, all the reported diamond N/MEMS devices are based on polycrystalline or nanocrystalline films, which have the disadvantages of the existence of grain boundaries, impurities, and large stress in the films; difficulty in electrical conductivity control; and poor reproducibility [158,159]. Therefore, N/MEMS devices made from these diamonds suffer from degradation in performance and poor reproducibility.…”
Section: Suspended Single-crystal Diamond Nanowires (Scd)mentioning
confidence: 99%