We demonstrate the first general tabletop EUV coherent microscope that can image extended, non-isolated, non-periodic, objects. By implementing keyhole coherent diffractive imaging with curved mirrors and a tabletop high harmonic source, we achieve improved efficiency of the imaging system as well as more uniform illumination at the sample, when compared with what is possible using Fresnel zone plates. Moreover, we show that the unscattered light from a semitransparent sample can be used as a holographic reference wave, allowing quantitative information about the thickness of the sample to be extracted from the retrieved image. Finally, we show that excellent tabletop image fidelity is achieved by comparing the retrieved images with scanning electron and atomic force microscopy images, and show superior capabilities in some cases.
IntroductionCoherent diffractive imaging (CDI) [1-6] is a powerful technique for imaging at the nanoscale. CDI enables near-wavelength-limited imaging, making this technique particularly attractive for use with large-and small-scale coherent extreme ultraviolet (EUV) [7][8][9][10][11][12] and X-ray sources [13], as well as with electron sources [14][15][16]. Also known as lensless imaging, CDI reconstructs both the amplitude and the phase of an object by using the information contained in the intensity of its far-field diffraction pattern. This is accomplished via iterative algorithms [17][18][19][20] which can retrieve the phase of the diffraction pattern, provided that the measured diffraction pattern satisfies an oversampling condition [21,22]. Furthermore, images obtained using CDI can achieve near diffraction-limited resolution [2,8,11,13]. This is in contrast to conventional EUV/X-ray microscopy using Fresnel zone plates (FZP), in which the resolution is limited by the width of the outermost zone. To date, CDI has been used to extract the structure and dynamics of a variety of objects, including biological samples [5,23], magnetic materials [24,25], strain fields inside a nanocrystal [26] and integrated circuits [27]. The first X-ray demonstration of CDI was at a synchrotron source in 1999 [2]. By 2007, it was possible to implement CDI using tabletop EUV sources, and in particular, fully spatially coherent high harmonic generation (HHG) beams [7,28,29]. More recently, by illuminating an object with a tabletop HHG source at a wavelength of 13 nm, a record 22 nm spatial resolution was achieved for a tabletop, full-field, photon-based microscope [11].