The most abundant, long-lived stable gaseous species generated by corona discharges in SF 6 gas containing trace levels of 0, and H,0 are the oxyfluorides SOF,, SOF, and SOF 4 . Absolute energy and charge rates-ofproduction of these and the minor products SO,, OCS, and CO2 have been measured at different total gas pressures from 100 kPa to 300 kPa and for discharges of different current, power, and polarity. Oxyfluoride yields for SF6/02 mixtures containing up to 10% 0, have also been measured. The results indicate that oxyfluoride production is not controlled by the concentrations of either 0, or H,0 at levels below about I%, and the rate controlling factor is the dissociation rate of SF 6 in the discharge. The discharge current and time dependence of the production rates are discussed in terms of gas-phase mechanisms that have been proposed to explain previous observations of electrical, thermal, and laser-induced decomposition of SF 6 and SFs/O, mixtures. Upper limits on the total SF 6 decomposition rate in low-current discharges have been estimated. Details of the chemical analysis procedures are given, and application of the results to the design of chemical diagnostics for SF 6 -insulated, high-voltage apparatus is discussed.