Introductory investigations performed in order to make quantitative electron-probe microanalysis of very light elements such as boron, carbon, nitrogen or oxygen possible are described. The practical problems encountered in this kind of work are discussed in detail and, where possible, solutions are proposed. It is shown that with very light elements such as carbon it is no longer permitted to measure x-ray intensities at the position of the maximum of the emission peak as the shape of the carbon K a peak is subject to strong alterations, depending on the type of chemical bond involved. As a consequence, integral measurements have to be performed and it is shown that errors of 3040% can easily be made if this is neglected. The lengthy procedures, connected with integral intensity measurements, can be shortened considerably by the introduction of arealpeak factors, which, by definition, represent the ratio between the correct area (integral) and the peak intensity ratio. The accurate determination of such factors for 13 binary carbides is described. This set of factors will permit future measurements simply on the peak; multiplication of the peak intensity ratio by the appropriate aredpeak factors will then yield the correct integral intensity ratios.