This study was performed to obtain the concentration of defects and the activities of components in wustite doped with MeO(Me: Ca, Sr and Ba). The composition as FeO-Fe2/3O-MeO for wustite in equilibrium with CO-CO2 gas mixtures of Pco2/Pco=30/70, 50/50 and 60/40 at temperatures of 1273, 1373 and 1473K, was determined by an analytical method utilizing the weight loss during reduction. The concentration of cation vacancies (V"Fe) is estimated as one-third of the mole fraction of Fe2/3O. The value of (V"Fe) increases with an increase in the amount of MeO and in the ionic radius of Me except for the higher concentrations of CaO. The increase in the value of (V"Fe) may be interpreted qualitatively by considering that the strain generated due to the difference in radius in the substitutional dissolution of MeO were estimated by Schuhmann's method from the oxygen pressure contours for wustite doped with CaO at 1273K.