“…Such devices can be used in many applications such as oil and gas drilling, aeronautic and space structures, and turbines [1]. In the past, lead zirconate titanate or [Pb(Zr1-x Tix )O3] based devices have been widely used in actuators and sensors owing to their intrinsic advantages such as strong piezoelectric effect, low power, high energy densities, low cut-off frequency, fast operation, excellent electrical properties and high Curie temperature system [2,3]. Among all PZT compositions, Pb(Zr 0.52 Ti 0.48 )O 3 , where structure changes from rhombohedral-ferroelectric rhombohedral (R) to tetragonal (T) via a narrow monoclinic (M) region has been of particular interest in MEMS applications because of PZT's excellent ferroelectric and electro-optic properties at this point [4][5][6].…”