Dielectric characterisation of oxyacetylene flame-deposited diamond thin films

Effects of the deposition conditions and annealing process on the electric properties of hot-filament CVD diamond films

“…The real part of the capacity is not affected by direct conductivity, i.e. by the charge transport from one plate of the capacitor to the other, because this only depends on the polarization of the material, and is only determined by the charge movement limited in space [4]. From the resistivity of CVD diamond films and that of Si substrate, we can simplify that the measured capacity only depends on that of CVD diamond films, i.e.…”

“…Therefore, it is important that projects on the electric characterization and the improvement of film quality are initiated as soon as possible. Although there exists much research on the electric properties of CVD diamond films, not much attention has been paid to what happens when the fields are frequency-dependent [4]. This work reports a study of the dielectric properties at frequencies between 10 kHz and 6 MHz of CVD diamond films grown on Si substrate by the hotfilament chemical vapor deposition (HFCVD) technique.…”