2008
DOI: 10.1116/1.2905251
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Dielectric properties of high-density-plasma fluorinated-silicate glass by doping nitrogen

Abstract: Nitrogen-doped fluorinated-silicate-glass (N-FSG) films were prepared by adding N-2 gas to the SiH4/SiF4/O-2/Ar gas mixtures using high-density-plasma (HDP) chemical vapor deposition method. When N-2 is increasingly added, the fluorine concentration of the films increases and the dielectric constant decreases from 3.8 to 3.4. In addition, better gap-filling ability is obtained by adding N-2 due to a lowered deposition/(sputtering+etching) (D/S+E) ratio. Moreover, these films were stabilized by a decreased chan… Show more

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