2000
DOI: 10.1143/jjap.39.2675
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Dielectric Properties of Internal Capacitors in Co-fired Ceramic Substrates

Abstract: Dielectric properties of barium titanate-based internal capacitors characterized by capacitance, dissipation factor, and temperature change in capacitance are reported. A capacitance of about 10 nF/cm2 with the dissipation factor of 2.3% is obtained for the BaTi0.975O3+2 wt% LiF internal capacitor after being co-fired with low dielectric constant ceramic substrates at 900°C. The percent change of capacitance is confined within ±10%. The dissipation factor is stable and decreases with in… Show more

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Cited by 4 publications
(3 citation statements)
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“…Mismatched densification kinetics and severe chemical reaction between the different materials could generate undesirable defects such as delamination, cracks and camber in the final products. However, the reaction and diffusion between the BaTiO 3 added with sintering aids and LTCC substrates during cofiring has seldom been reported [5,6].…”
Section: Introductionmentioning
confidence: 99%
“…Mismatched densification kinetics and severe chemical reaction between the different materials could generate undesirable defects such as delamination, cracks and camber in the final products. However, the reaction and diffusion between the BaTiO 3 added with sintering aids and LTCC substrates during cofiring has seldom been reported [5,6].…”
Section: Introductionmentioning
confidence: 99%
“…The integration of passive components into LTCCs can offer advantages such as increasing the circuit surface area of ICs and improving reliability. In addition, there has been recent demand, in the interests of the downsizing and high efficiency of wireless communication systems, for the development of high-performance LTCC modules with embedded capacitors having high capacitance density [1][2][3].…”
Section: Introductionmentioning
confidence: 99%
“…In addition, there has been recent demand, in the interests of the downsizing and high efficiency of wireless communication systems, for the development of high-performance LTCC modules with embedded capacitors having high capacitance density. 1,2) However, because dielectric ceramics with a low dielectric constant (" 100) are generally used for the fabrication of LTCCs with a high Q-value for high frequency, [3][4][5][6] it is difficult to build an embedded high-density capacitor only with LTCCs. High-dielectric-constant materials are mainly based on BaTiO 3 (BT)-based ceramics, however, the sintering temperatures of these ceramics are too high (!1300 C) for LTCC processing.…”
Section: Introductionmentioning
confidence: 99%