Field experience shows that the long-term existence of the partial discharge (PD) in gas-insulated switchgear (GIS) will gradually erode the insulation and ultimately cause disastrous insulation breakdown. The decomposition compound analysis of SF 6 in GIS is an effective method to diagnose the PDs caused by insulation defects. It is significant to clarify the decomposition characteristics of SF 6 under PDs, which is common in GIS. In this paper the discharge energy/charge and SF 6 decomposition under PDs with point-to-plane electrode defect were investigated under different factors such as needle curvature, applied voltage, gas pressure and moisture content (adsorbent). And the feature extraction of SF 6 decomposition under PDs was also discussed. The results show that the yields of SOF 2 , SO 2 F 2 and SO 2 tend to increase approximately linearly with the accumulation of PD energy. In addition, the needle curvature and applied voltage have a great influence on the discharge energy/charge and the yield of SOF 2 /SO 2 F 2 . Also, the adsorbents composed of KDHF-03 or F-03 have a certain effect on the discharge energy. Besides, the discharge energy and charge tend to decrease with the increased moisture content, and the yields of SOF 2 , SO 2 F 2 and SO 2 are affected by the humidity (250 L/L -2500 L/L) observably.Index Terms -Decomposition compound analysis, gas insulated switchgear, pointto-plane electrode defect, SF 6 .