Difference–Sum Generalized Ellipsometry Method for Thin Films with Small Optical Anisotropy

Abstract

We have devised a difference-sum generalized ellipsometry method for measuring the optical properties of anisotropic thin films. This method enables the evaluation of samples with a small anisotropy because of the two effects of P-or S-polarized incident light and the noise reduction by the difference measurement, which is difficult with the conventional methods. We measured a rubbed polyimide film on a glass substrate and showed that this method enables the measurement of the phase difference Á ps and amplitude jr ps j=jr ss j ( tan É ps ) of the normalized Jones matrix of a sample whose tan É ps is as small as 2 Â 10 À3 , which is near the expected maximum ability restricted by the quality of polarizer used in the measurement system for demonstration.

Molecular Ordering Behavior of Lyotropic Chromonic Liquid Crystals on a Polyimide Alignment Layer

“…To determine the existence of dielectric anisotropy after rubbing, optical anisotropies of the films were measured by an optical equipment (Layscan LYS-LS10S, Moritex) using a differencesum generalized ellipsometry method. 47 Figure S3 shows optical intensity difference for rotation angle of the rubbed PI film, and optical anisotropy was calculated to be 0.0546. Meanwhile, the nonrubbed PI film did not show optical intensity difference with optical anisotropy of zero.…”

“…The PI polymer can interact with the ionic functional group of LCAs to form strong ion-dipole bonds which helps LCAs align to the RD. To determine the existence of dielectric anisotropy after rubbing, optical anisotropies of the films were measured by an optical equipment (Layscan LYS-LS10S, Moritex) using a difference-sum generalized ellipsometry method Figure S3 shows optical intensity difference for rotation angle of the rubbed PI film, and optical anisotropy was calculated to be 0.0546.…”