“…Recently, organic and inorganic silicon (Si)-related coatings, such as carbon-containing silicon oxide (SiOC) and SiO 2 -like films, at low temperatures using AP plasma have drawn much interest in advanced industries for use in many applications, such as scratch-resistant and anti-reflection coatings [3][4][5][6][7][8][9], food and pharmaceutical packaging [10][11][12], and corrosion protection [13,14]. Several types of AP plasma sources, including dielectric barrier discharges, radio frequency glow discharges and AP plasma jets, have successfully been used to fabricate Si-related coatings [13][14][15][16][17][18][19][20][21][22][23][24].…”