Differential Characteristics of the Particles Sputtered by Gas Cluster Ions at Elevated Temperatures. Molecular Dynamics Simulation

Ieshkin, A.E.; Nazarov, A.V.; Bessmertny, Danila; Kutlusurin, Ilias; Shemukhin, Andrey

doi:10.2139/ssrn.4663835

2023

DOI: 10.2139/ssrn.4663835

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Differential Characteristics of the Particles Sputtered by Gas Cluster Ions at Elevated Temperatures. Molecular Dynamics Simulation

A.E. Ieshkin,

A.V. Nazarov,

Danila Bessmertny

et al.

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Differential Characteristics of the Particles Sputtered by Gas Cluster Ions at Elevated Temperatures. Molecular Dynamics Simulation

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References 31 publications

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