2001
DOI: 10.1117/1.1331270
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Diffractive optical element-based profilometer for surface inspection

Abstract: We introduce a new 3-D sensor based on a diffractive optical element (DOE). Structured light is obtained by the interference of two beams. The design of the projection unit has the following features: the system is very simple, small and cheap and the fringe spacing is easily adjustable. Fringes generated by the DOE interferometer are analyzed by Fast Fourier Transform (FFT) method, which produced a 3-D perspective plot. The technique and the experimental results of real surface profiles are given

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Cited by 23 publications
(1 citation statement)
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“…The grating acts as a beam divider, therefore interference fringes are formed in the superposition region of the two exiting beams. It can be shown 13,14 that, using a phase saw-tooth grating as a beam divider, good diffraction efficiency is obtained. Furthermore, the light intensity on a plane at a distance R from the grating (and distance Lp from the source) represents straight fringes, which are parallel to each other (Young's fringes).…”
Section: The Fringe Generatormentioning
confidence: 99%
“…The grating acts as a beam divider, therefore interference fringes are formed in the superposition region of the two exiting beams. It can be shown 13,14 that, using a phase saw-tooth grating as a beam divider, good diffraction efficiency is obtained. Furthermore, the light intensity on a plane at a distance R from the grating (and distance Lp from the source) represents straight fringes, which are parallel to each other (Young's fringes).…”
Section: The Fringe Generatormentioning
confidence: 99%