2009
DOI: 10.1007/978-3-642-03889-1_26
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Diffusion Limited Tapered Coating with Parylene C

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“…Activation energy (Ea), solubility S, and permeable parameters of gases through amorphous and crystalline PPX C membranes. [1,11,1227,32,33] Gas Ea/eV Amorphous PPX C Crystalline PPX C S/cm 3 P Calc /10 −12 cm 3 S/cm 3 P Calc /10 −12 cm 3 P Exp /10 The calculated permeability is comparable to the experimental results [1,11,12,27,32,33] in Table 5. They have the same order of magnitude.…”
Section: Permeability Coefficients Of Gases Through Ppx C Membranessupporting
confidence: 80%
“…Activation energy (Ea), solubility S, and permeable parameters of gases through amorphous and crystalline PPX C membranes. [1,11,1227,32,33] Gas Ea/eV Amorphous PPX C Crystalline PPX C S/cm 3 P Calc /10 −12 cm 3 S/cm 3 P Calc /10 −12 cm 3 P Exp /10 The calculated permeability is comparable to the experimental results [1,11,12,27,32,33] in Table 5. They have the same order of magnitude.…”
Section: Permeability Coefficients Of Gases Through Ppx C Membranessupporting
confidence: 80%