2010
DOI: 10.1002/adma.201000663
|View full text |Cite
|
Sign up to set email alerts
|

Diffusion of Adhesion Layer Metals Controls Nanoscale Memristive Switching

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

10
76
2

Year Published

2011
2011
2021
2021

Publication Types

Select...
8

Relationship

1
7

Authors

Journals

citations
Cited by 112 publications
(88 citation statements)
references
References 46 publications
(31 reference statements)
10
76
2
Order By: Relevance
“…The bottom electrodes are patterned using conventional optical lithography on silicon substrates SiO 2 /Si (200 nm/500 mm). An anchoring layer of Ti (5 nm) and a Pt layer (25 nm) are deposited by e-beam evaporation before lift-off of the patterned resist 47 . Then, a 30-nm TiO 2 switching layer is fabricated by atomic layer deposition at 200°C using titanium isopropoxide (C 12 H 28 O 4 Ti) and water as the precursor and reactant, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…The bottom electrodes are patterned using conventional optical lithography on silicon substrates SiO 2 /Si (200 nm/500 mm). An anchoring layer of Ti (5 nm) and a Pt layer (25 nm) are deposited by e-beam evaporation before lift-off of the patterned resist 47 . Then, a 30-nm TiO 2 switching layer is fabricated by atomic layer deposition at 200°C using titanium isopropoxide (C 12 H 28 O 4 Ti) and water as the precursor and reactant, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…2(a). In fact, Cr can chemically reduce TiO 2 and create oxygen vacancies in the TiO 2 layer [26]. The reason is that there are many other phases in the Ti-O system, such that Cr does not have to reduce the oxide all the way to Ti metal, and the full set of intermediate oxide phases are not shown in a normal Ellingham diagram.…”
mentioning
confidence: 99%
“…Then a blank TiO 2 layer of 25 nm was sputter deposited at a substrate temperature 270 • C. During the deposition of the TiO 2 layer, the Ti adhesion layer diffused through the bottom Pt electrode at the elevated deposition temperature, reached the Pt/TiO 2 interface, reacted with the TiO 2 layer and created a significant Fig. 1 (a)-(f) I -V [26]. This bottom interface remained conductive during all the electrical testing, and the more resistive top interfaces dominated the electronic transport in these devices.…”
mentioning
confidence: 99%
See 1 more Smart Citation
“…An irreversible forming process under strong electric field is generally required to activate the memristive switching in oxides. 7,14,15,[20][21][22] Such process related to a soft breakdown brings more defects (oxygen vacancies) in the matrix according to the oxygen exchange reaction…”
Section: 21mentioning
confidence: 99%