In this paper, we investigate electrical effects of transistor layout shape (both in the channel and diffusion) on the performance and leakage current. Through layout optimization techniques, we propose a novel intra-gate biasing technique to reduce leakage current while maintaining drive current. Results show that by replacing all standard cells with their leakage-optimized counterparts, we can save up to 17% of the leakage in average for a set of benchmark circuits. Diffusion rounding is another interesting effect which happens due to the imperfect source and drain profile in the sub-wavelength lithography regime. TCAD analysis shows that diffusion rounding at the transistor source side can provide increased I on with decreased I off because of the edge effect. The proposed diffusion-rounded CMOS shows as much as 10% improvement both in the on-current (driving) and the off-current (leakage).