2005
DOI: 10.1002/mawe.200500871
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Diffusionssperrschichten für Polymere - Messtechnische Herausforderung

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Cited by 4 publications
(3 citation statements)
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“…Our previous work using asymmetric RF discharges with methane (CH 4 ) has also revealed a linear range over a broad parameter field up to a sheath voltage of 500 V and down to a pressure of 4 Pa, conditions at which ion energies up to 100 eV are easily generated 51, 53. Similar results were obtained by Corbella et al54, 55 For hydrocarbon plasmas, it could be demonstrated that mainly plasma chemistry affects the deposited mass over a broad parameter range yielding dense barrier coatings 49, 56–59…”
Section: Resultssupporting
confidence: 72%
“…Our previous work using asymmetric RF discharges with methane (CH 4 ) has also revealed a linear range over a broad parameter field up to a sheath voltage of 500 V and down to a pressure of 4 Pa, conditions at which ion energies up to 100 eV are easily generated 51, 53. Similar results were obtained by Corbella et al54, 55 For hydrocarbon plasmas, it could be demonstrated that mainly plasma chemistry affects the deposited mass over a broad parameter range yielding dense barrier coatings 49, 56–59…”
Section: Resultssupporting
confidence: 72%
“…[51,53] Similar results were obtained by Corbella et al [54,55] For hydrocarbon plasmas, it could be demonstrated that mainly plasma chemistry affects the deposited mass over a broad parameter range yielding dense barrier coatings. [49,[56][57][58][59] Despite the fact that the same apparent activation energy is obtained for both experimental series shown in Figure 3, the actual mass deposition rate per monomer flow is seen to vary with the actual C 2 H 4 flow rate. While the absolute mass deposition rate R m for the higher flow is still higher, R m /F is noticeably reduced.…”
Section: à5mentioning
confidence: 67%
“…Numerous approaches exist for their realization. [1][2][3][4] Silica films of 50-500 nm thickness deposited onto polymeric substrates are of significant interest for a broad variety of applications. In fact, the successful realization of numerous high-tech applications such as flexible organic light-emitting diodes or solar cells is highly dependent on the existence of suitable barrier materials that protect these materials against oxygen and moisture.…”
Section: Introductionmentioning
confidence: 99%