AbstractThere is no doubt that the tremendous development of information technology was one of the driving factors behind the great growth of surveying and geodesy science. This has spawned modern geospatial techniques for data capturing, acquisition, and visualization tools. Digital elevation model (DEM) is the 3D depiction of continuous elevation data over the Earth’s surface that is produced through many procedures such as remote sensing, photogrammetry, and land surveying. DEMs are essential for various surveying and civil engineering applications to generate topographic maps for construction projects at a scale that varies from 1:500 to 1:2,000. GIS offers a powerful tool to create a DEM with high resolution from accurate land survey measurements using interpolation methods. The aim of this research is to investigate the impact of estimation techniques on generating a reliable and accurate DEM suitable for large-scale mapping. As a part of this study, the deterministic interpolation algorithms such as ANUDEM (Topo to Raster), inverse distance weighted (IDW), and triangulated irregular network (TIN) were tested using the ArcGIS desktop for elevation data obtained from real total station readings, with different landforms to show the effect of terrain roughness, data density, and interpolation process on DEM accuracy. Furthermore, comparison and validation of each interpolator were carried out through the cross-validation method and numerous graphical representations of the DEM. Finally, the results of the investigations showed that ANUDEM and TIN models are similar and significantly better than those attained from IDW.