2000
DOI: 10.1016/s0924-4247(99)00260-5
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Digital micropropulsion

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Cited by 205 publications
(88 citation statements)
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“…We think that this size is marginal, although further miniaturization is expected. Previous studies 2,3) only confirmed the preliminary concept of the thruster. In this paper, we propose a novel structure with electrical feedthroughs to ignition heaters for practical application.…”
Section: Design and Structurementioning
confidence: 93%
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“…We think that this size is marginal, although further miniaturization is expected. Previous studies 2,3) only confirmed the preliminary concept of the thruster. In this paper, we propose a novel structure with electrical feedthroughs to ignition heaters for practical application.…”
Section: Design and Structurementioning
confidence: 93%
“…3). First, the sil- icon substrate is thermally oxidized, and the oxidized layer is patterned using buffered hydrofluoric acid (HF) solution to form mask openings (2). Through the mask openings, the silicon substrate is etched to a depth of 2.5 µm using tetramethyl ammonium hydroxide (TMAH) solution (3).…”
Section: Fabricationmentioning
confidence: 99%
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