Diluted Low Dielectric Constant Materials as Bottom Antireflective Coating Layers for both KrF and ArF Lithography Processes

Chen, Hsuen Li; Chao, Wen; Ko, Fu‐Hsiang; Chu, T. C.; Cheng, Hsu Chun

doi:10.1143/jjap.42.3885

Cited by 3 publications

(1 citation statement)

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“…As one of the solutions, the application of coating a bottom antireflective coating (BARC) between the resist and the substrate has been extensively investigated in order to decrease the reflectivity from the substrate. [1][2][3][4][5] Along with the progress of resist pattern scale miniaturization, thinner resist films are being used. Additionally the need to significantly reduce the time of the BARC etch process has required BARC that show good performance at thinner thickness or that possess higher etch rates in comparison to the resists being used.…”

Section: Introductionmentioning

confidence: 99%

Study of High Etch Rate Bottom Antireflective Coating and Gap Fill Materials Using Dextrin Derivatives in ArF Lithography

Takei

Shinjo

Sakaida

2007

jjap

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Sudden increases in the background gamma-radiation dose may occur due to the removal of 222 Rn and 220 Rn progeny from the atmosphere by wet deposition mechanisms. This contribution has been measured using a Geiger-Muller detector at the Atomic Weapons Establishment (Aldermaston, UK) during July 2005-April 2006. The results are approximated by a log-normal distribution and there were nine separate occurrences of the gamma-radiation dose exceeding 125% of the geometric mean value. The increases were associated with periods of heavy rainfall, although no correlation was evident between the dose rate and the amount of rainfall, as increased rainfall dilutes the activity further rather than increasing its atmospheric removal. The events were preceded by periods of fine weather and atmospheric stability that allow for the build-up of 222 Rn and 220 Rn progeny. Similar increases in gamma-radiation dose have been measured at a nearby monitoring station situated approximately 11 miles from Aldermaston. Increases in gamma-radiation dose during heavy rainfall have also been observed throughout the UK, that followed the trajectory of an air mass. All events decreased to typical values within 1-2 h as the water permeated into the ground below and the radioactivity decayed away.

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