Dimensional metrology with scanning probe microscopes

Abstract

Articles you may be interested inMetrological large range scanning probe microscope Rev. Sci. Instrum. 75, 962 (2004); 10.1063/1.1651638 Tip characterization for scanning probe microscope width metrology AIP Conf.Dimensional measurement of surface topography with a probe microscope requires surface proximity sensing, probe position measurement, a probe with known shape, and careful analysis of the image generated. Our probe microscope contains some novel features. The proximity detector is a magnetically constrained rocking-beam force sensor stabilized with a capacitance-based force-balance system. This sensor accepts a wide range of probe tips, which are fabricated separately. The probes are either focused-ion-beam etched metal or chemically etched optical fibers. We show measurements of features arising from semiconductor manufacture.

Critical issues in scanning electron microscope metrology

“…But, under scrutiny, limitations to this technique were also soon encountered [29,30,41]. These limitations include tip bending during the measurement scan, hysteresis and the need for tip characterization [29,31]. But, are all these criticisms based upon actual limitations to the tools or are they only limitations to the knowledge of the tool?…”

“…Scanning probe microscopy was then considered the "heir apparent" to the submicrometer metrology "throne." But, under scrutiny, limitations to this technique were also soon encountered [29,30,41]. These limitations include tip bending during the measurement scan, hysteresis and the need for tip characterization [29,31].…”

Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities

“…There exist a few methods for surface roughness measurements with heights of nanometer and sub-nanometer level at present. Among them the atomic force microscopy (Griffith & Grigg, 1993) and diffusion scattering of hard X-ray radiation (Sinha et al, 1988;Asadchikov et al, 1998) are mostly developed and widely used. A number of papers report a good agreement of experimental data about the surface roughness obtained by both methods (Kozhevnikov et al, 1999;Stone et al, 1999).…”

Applications of image diagnostics to metrology quality assurance and process control

“…In this case the interaction between the probe and sample may be confined to a very small volume, coming as close as possible to what may be considered direct sensing of a material interface [26,29], see Figure 3. Rapid changes in image intensity distribution I(x) are identified by the peak in its first derivative, |I'(x) = dI(x)/dx|.…”